The strengthening mechanism of DLC film on silicon by MPECVD

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalNot applicablepeer-review

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Author(s)

  • S. L. Sung
  • X. J. Guo
  • K. P. Huang
  • F. R. Chen
  • H. C. Shih

Detail(s)

Original languageEnglish
Pages (from-to)345-350
Journal / PublicationThin Solid Films
Volume315
Issue number1-2
Publication statusPublished - 2 Mar 1998
Externally publishedYes

Abstract

Diamond-like carbon (DLC) coatings were successfully produced on the silicon wafer by a microwave plasma enhanced chemical vapor deposition (MPECVD) with the precursor gases of methane, hydrogen and argon. High resolution transmission electron microscopy (HRTEM) was applied to analyze the nano-particles in the coating. Both diamond and silicon carbide (SiC) nano-clusters of sizes ranging from 2 to 5 nm were observed in the DLC films. The dispersion of nano-clusters of diamond and SiC improves the film quality in terms of crystallinity and hardness of the DLC coating significantly.

Research Area(s)

  • Diamond-like carbon, Microwave plasma enhanced chemical vapor deposition, Silicon

Citation Format(s)

The strengthening mechanism of DLC film on silicon by MPECVD. / Sung, S. L.; Guo, X. J.; Huang, K. P.; Chen, F. R.; Shih, H. C.

In: Thin Solid Films, Vol. 315, No. 1-2, 02.03.1998, p. 345-350.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalNot applicablepeer-review