TY - GEN
T1 - The pico-Newton order force measurement with a calibrated carbon nanotube probe
AU - Arai, Fumihito
AU - Nakajima, Masahiro
AU - Dong, Lixin
AU - Fukuda, Toshio
PY - 2003/7
Y1 - 2003/7
N2 - Force measurement with pico-Newton (pN) order resolution using a carbon nanotube (CNT) probe, which is calibrated by the electromechanical resonance, is presented. Based on the theoretical analysis, a CNT is suitable material for the sensitive force measurement. A CNT probe is constructed by attaching a CNT to the tip of the commercial available atomic force microscope (AFM) cantilever or tungsten needle probe by the electron-beam-induced deposition (EBID) though the nanorobotic manipulators inside a field-emission scanning electron microscope (FE-SEM). In order to attach a CNT quickly and correctly, CNTs are dispersed in ethanol by ultrasonic waves for several hours and oriented by electrophoresis. The elastic moduli of CNTs are calibrated from electromechanical resonance frequency by applied electrostatic forces. We measured pico-Newton order contact forces with a CNT probe, which is constructed with nanorobotic manipulators, by measuring deformation of a CNT probe from FE-SEM images.
AB - Force measurement with pico-Newton (pN) order resolution using a carbon nanotube (CNT) probe, which is calibrated by the electromechanical resonance, is presented. Based on the theoretical analysis, a CNT is suitable material for the sensitive force measurement. A CNT probe is constructed by attaching a CNT to the tip of the commercial available atomic force microscope (AFM) cantilever or tungsten needle probe by the electron-beam-induced deposition (EBID) though the nanorobotic manipulators inside a field-emission scanning electron microscope (FE-SEM). In order to attach a CNT quickly and correctly, CNTs are dispersed in ethanol by ultrasonic waves for several hours and oriented by electrophoresis. The elastic moduli of CNTs are calibrated from electromechanical resonance frequency by applied electrostatic forces. We measured pico-Newton order contact forces with a CNT probe, which is constructed with nanorobotic manipulators, by measuring deformation of a CNT probe from FE-SEM images.
KW - Atomic force microscopy
KW - Atomic layer deposition
KW - Carbon nanotubes
KW - Electrostatic measurements
KW - Force measurement
KW - Joining processes
KW - Probes
KW - Resonance
KW - Scanning electron microscopy
KW - Ultrasonic variables measurement
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UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-34249774088&origin=recordpage
U2 - 10.1109/AIM.2003.1225427
DO - 10.1109/AIM.2003.1225427
M3 - RGC 32 - Refereed conference paper (with host publication)
SN - 0-7803-7759-1
T3 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM
SP - 691
EP - 696
BT - Proceedings of the 2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM 2003)
PB - IEEE
T2 - 2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2003
Y2 - 20 July 2003 through 24 July 2003
ER -