The nano-scratch behaviour of different diamond-like carbon film-substrate systems

Li-Ye Huang; Jian Lu; Ke-Wei Xu

doi:10.1088/0022-3727/37/15/013

Author(s)

Li-Ye Huang
Jian Lu
Ke-Wei Xu

Detail(s)

Original language	English
Pages (from-to)	2135-2139
Journal / Publication	Journal of Physics D: Applied Physics
Volume	37
Issue number	15
Publication status	Published - 7 Aug 2004
Externally published	Yes

Link(s)

DOI	DOI https://doi.org/10.1088/0022-3727/37/15/013 Final Published version
	Check@CityULib
Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-3843073046&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(80629189-069e-4c86-9ed6-889347f8f067).html

Abstract

The nano-scratch behaviour of diamond-like carbon films on a Ti alloy and Si substrate was evaluated. For both samples, three processes - fully elastic recovery, plastic deformation, and delamination and pulling-off of the films, occur successively with increasing load during scratching. The loads (Lc _L) corresponding to the peeling-off of the films during the up-loading were 75 and 70 mN for Ti alloy and Si. However, the films on Si were delaminated during unloading, and the relevant load (Lc_U) was only 45 mN. This probably originates from the distribution status of the plastic deformation both in the films and the substrates. Therefore, the nano-scratch test can be applied not only to obtain the cracking resistance (Lc_L) characterizing the cohesion strength of films during up-loading but also to determine the delamination resistance (Lc_U) related to the adhesion strength of the film-substrate during unloading.

Citation Format(s)

[ RIS ] [ BibTeX ]

The nano-scratch behaviour of different diamond-like carbon film-substrate systems. / Huang, Li-Ye; Lu, Jian; Xu, Ke-Wei.

In: Journal of Physics D: Applied Physics, Vol. 37, No. 15, 07.08.2004, p. 2135-2139.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

Huang, L-Y, Lu, J & Xu, K-W 2004, 'The nano-scratch behaviour of different diamond-like carbon film-substrate systems', Journal of Physics D: Applied Physics, vol. 37, no. 15, pp. 2135-2139. https://doi.org/10.1088/0022-3727/37/15/013

Huang, L-Y., Lu, J., & Xu, K-W. (2004). The nano-scratch behaviour of different diamond-like carbon film-substrate systems. Journal of Physics D: Applied Physics, 37(15), 2135-2139. https://doi.org/10.1088/0022-3727/37/15/013

Huang L-Y, Lu J, Xu K-W. The nano-scratch behaviour of different diamond-like carbon film-substrate systems. Journal of Physics D: Applied Physics. 2004 Aug 7;37(15):2135-2139. doi: 10.1088/0022-3727/37/15/013

Huang, Li-Ye ; Lu, Jian ; Xu, Ke-Wei. / The nano-scratch behaviour of different diamond-like carbon film-substrate systems. In: Journal of Physics D: Applied Physics. 2004 ; Vol. 37, No. 15. pp. 2135-2139.