Abstract
A model for diamond nucleation by energetic species (for example, bias-enhanced nucleation) is proposed. It involves spontaneous bulk nucleation of a diamond embryo cluster in a dense, amorphous carbon hydrogenated matrix; stabilization of the cluster by favorable boundary conditions of nucleation sites and hydrogen termination; and ion bombardment-induced growth through a preferential displacement mechanism. The model is substantiated by density functional tight-binding molecular dynamics simulations and an experimental study of the structure of bias-enhanced and ion beam-nucleated films. The model is also applicable to the nucleation of other materials by energetic species, such as cubic boron nitride.
| Original language | English |
|---|---|
| Pages (from-to) | 1531-1533 |
| Journal | Science |
| Volume | 297 |
| Issue number | 5586 |
| DOIs | |
| Publication status | Published - 30 Aug 2002 |
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