The mechanism of chemical vapor deposition of cubic boron nitride films from fluorine-containing species
Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review
Fingerprint
???publication_fingerprints_help???
Engineering & Materials Science
Medicine & Life Sciences
Chemicals & Drugs
Objects
Concepts & Ideas
Disorders
Research OutputsResearch Output authored by The mechanism of chemical vapor deposition of cubic boron nitride films from fluorine-containing species is tagged with the concept
Find experts having the same concept