The Ion Heating during Plasma Immersion Ion Processing

Xiubo Tian; Xiaofeng  Wang; Aiguo Liu; Langping Wang; Songyan Wang; Baoyin Tang; Paul Kim Ho CHU

The Ion Heating during Plasma Immersion Ion Processing

Xiubo Tian
, Xiaofeng Wang
, Aiguo Liu
, Langping Wang
, Songyan Wang
, Baoyin Tang
, Paul Kim Ho CHU

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Publication status	Published - 13 Oct 1999
Event	3rd International Conference on Physical and Numerical Simulation of Materials and Hot Working (ICPNS '99) - Beijing, China Duration: 10 Oct 1999 → 14 Oct 1999

Conference

Conference	3rd International Conference on Physical and Numerical Simulation of Materials and Hot Working (ICPNS '99)
Abbreviated title	ICPNS'99
Place	China
City	Beijing
Period	10/10/99 → 14/10/99

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Information for this record is provided by the author(s) concerned.

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Cite this

@conference{f9d36d5a0f5c4c73ad1e567920d9c9b4,

title = "The Ion Heating during Plasma Immersion Ion Processing",

author = "Xiubo Tian and Xiaofeng Wang and Aiguo Liu and Langping Wang and Songyan Wang and Baoyin Tang and CHU, \{Paul Kim Ho\}",

note = "Information for this record is provided by the author(s) concerned. ; 3rd International Conference on Physical and Numerical Simulation of Materials and Hot Working (ICPNS '99), ICPNS'99 ; Conference date: 10-10-1999 Through 14-10-1999",

year = "1999",

month = oct,

day = "13",

language = "English",

}

The Ion Heating during Plasma Immersion Ion Processing. / Tian, Xiubo; Wang, Xiaofeng ; Liu, Aiguo et al.
1999. Paper presented at 3rd International Conference on Physical and Numerical Simulation of Materials and Hot Working (ICPNS '99), Beijing, China.

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

TY - CONF

T1 - The Ion Heating during Plasma Immersion Ion Processing

AU - Tian, Xiubo

AU - Wang, Xiaofeng

AU - Liu, Aiguo

AU - Wang, Langping

AU - Wang, Songyan

AU - Tang, Baoyin

AU - CHU, Paul Kim Ho

N1 - Information for this record is provided by the author(s) concerned.

PY - 1999/10/13

Y1 - 1999/10/13

M3 - RGC 32 - Refereed conference paper (without host publication)

T2 - 3rd International Conference on Physical and Numerical Simulation of Materials and Hot Working (ICPNS '99)

Y2 - 10 October 1999 through 14 October 1999

ER -