The Ion Heating during Plasma Immersion Ion Processing

Xiubo Tian; Xiaofeng Wang; Aiguo Liu; Langping Wang; Songyan Wang; Baoyin Tang; Paul Kim Ho CHU

The Ion Heating during Plasma Immersion Ion Processing

Research output: Conference Papers (RGC: 31A, 31B, 32, 33) › 32_Refereed conference paper (no ISBN/ISSN) › peer-review

Overview

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Author(s)

Xiubo Tian
Xiaofeng Wang
Aiguo Liu
Langping Wang
Songyan Wang
Baoyin Tang

Related Research Unit(s)

Department of Physics

Detail(s)

Original language	English
Publication status	Published - 13 Oct 1999

Conference

Title	3rd International Conference on Physical and Numerical Simulation of Materials and Hot Working (ICPNS '99)
Place	China
City	Beijing
Period	10 - 14 October 1999

Link(s)

	Check@CityULib
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(f9d36d5a-0f5c-4c73-ad1e-567920d9c9b4).html

Bibliographic Note

Information for this record is provided by the author(s) concerned.

Citation Format(s)

[ RIS ] [ BibTeX ]

The Ion Heating during Plasma Immersion Ion Processing. / Tian, Xiubo; Wang, Xiaofeng; Liu, Aiguo et al.

1999. Paper presented at 3rd International Conference on Physical and Numerical Simulation of Materials and Hot Working (ICPNS '99), Beijing, China.

Research output: Conference Papers (RGC: 31A, 31B, 32, 33) › 32_Refereed conference paper (no ISBN/ISSN) › peer-review

Tian, X, Wang, X, Liu, A, Wang, L, Wang, S, Tang, B & CHU, PKH 1999, 'The Ion Heating during Plasma Immersion Ion Processing', Paper presented at 3rd International Conference on Physical and Numerical Simulation of Materials and Hot Working (ICPNS '99), Beijing, China, 10/10/99 - 14/10/99.

Tian, X., Wang, X., Liu, A., Wang, L., Wang, S., Tang, B., & CHU, P. K. H. (1999). The Ion Heating during Plasma Immersion Ion Processing. Paper presented at 3rd International Conference on Physical and Numerical Simulation of Materials and Hot Working (ICPNS '99), Beijing, China.

Tian X, Wang X, Liu A, Wang L, Wang S, Tang B et al.. The Ion Heating during Plasma Immersion Ion Processing. 1999. Paper presented at 3rd International Conference on Physical and Numerical Simulation of Materials and Hot Working (ICPNS '99), Beijing, China.

Tian, Xiubo ; Wang, Xiaofeng ; Liu, Aiguo et al. / The Ion Heating during Plasma Immersion Ion Processing. Paper presented at 3rd International Conference on Physical and Numerical Simulation of Materials and Hot Working (ICPNS '99), Beijing, China.