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The growth of SiGe quantum rings in Au thin films on epitaxial SiGe on silicon

  • J. H. He
  • , Y. L. Chueh
  • , W. W. Wu
  • , S. W. Lee
  • , L. J. Chen
  • , L. J. Chou

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

Abstract

Self-assembled SiGe quantum rings (QRs) on Si0.8Ge0.2 substrate has been formed by thermal annealing of the samples with capping Au thin films at 1100 °C in N2 ambient. Miniature quantum rings have a narrow distribution of diameter and height of 27.9±1.7 and 1.53±0.10 nm, respectively. The formation of quantum rings was found to be mediated by the Au nanoparticles. As the size of Au nanoparticles can be adjusted, the method promises to be an effective technique to produce high density, uniform in size quantum rings. © 2004 Elsevier B.V. All rights reserved.
Original languageEnglish
Pages (from-to)478-482
JournalThin Solid Films
Volume469-470
Online published12 Sept 2004
DOIs
Publication statusPublished - 22 Dec 2004
Externally publishedYes

Research Keywords

  • Nanorings
  • Quantum rings
  • Self-assembly
  • SiGe

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