The Fabrication of Grating for 1.55 μm InGaAsP DFB Laser Array by E-Beam Lithography
Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45) › 32_Refereed conference paper (with host publication) › peer-review
Author(s)
Related Research Unit(s)
Detail(s)
| Original language | English |
|---|---|
| Title of host publication | Fifth Asia-Pacific Conference Communications and Fourth Optoloelectronics and Communications Conference on communications |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 1545-1547 |
| Volume | 2 |
| ISBN (Print) | 7-5635-0402-8 |
| Publication status | Published - Oct 1999 |
Conference
| Title | 5th Asia-Pacific Conference Communications and 4th Optoloelectronics Communications Conference, APCC/OECC 1999 |
|---|---|
| Place | China |
| City | Beijing |
| Period | 18 - 22 October 1999 |
Link(s)
Abstract
First-order and second-order gratings for the 1.55 μm wavelength InGaAsP laser have been fabricated by e-beam lithography on the InP substrate. The pattern is transferred into the InP substrate by wet chemical etching using HNO3:HBr:H2O and reactive ion etching using the gas mixture CH4:H2:Ar2. The experimental results have proven that a PMMA resist of 200 nm thickness can not only stand up to wet chemical etching but also to reactive ion etching.
Research Area(s)
- Optical device fabrication, Gratings, Optical arrays, Wet etching, Chemical lasers, Indium phosphide, Gas lasers, Lithography, Argon, Resists
Citation Format(s)
The Fabrication of Grating for 1.55 μm InGaAsP DFB Laser Array by E-Beam Lithography. / Yue-Bun, Edwin; Wong, Polis Wing Han; Xuejin, Yan et al.
Fifth Asia-Pacific Conference Communications and Fourth Optoloelectronics and Communications Conference on communications. Vol. 2 Institute of Electrical and Electronics Engineers Inc., 1999. p. 1545-1547.
Fifth Asia-Pacific Conference Communications and Fourth Optoloelectronics and Communications Conference on communications. Vol. 2 Institute of Electrical and Electronics Engineers Inc., 1999. p. 1545-1547.
Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45) › 32_Refereed conference paper (with host publication) › peer-review
