The effects of cubic stiffness on fatigue characterization resonator performance

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

10 Scopus Citations
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Author(s)

  • M. Budnitzki
  • M.C. Scates
  • E.A. Stach
  • C.L. Muhlstein
  • O.N. Pierron

Detail(s)

Original languageEnglish
Pages (from-to)228-234
Journal / PublicationSensors and Actuators, A: Physical
Volume157
Issue number2
Online published26 Nov 2009
Publication statusPublished - Feb 2010
Externally publishedYes

Abstract

Micromachined, kHz-frequency resonators are now routinely employed as testing structures to characterize the fatigue degradation properties of thin film materials such as polycrystalline silicon (polysilicon). In addition to stress-life (S-N) fatigue curves, important properties such as crack propagation rates may be inferred from proper resonant frequency measurements throughout a fatigue test. Consequently, any nonlinear dynamic behavior that would complicate the interpretation of resonant frequency changes should be avoided. In this paper, nonlinear frequency-response curves of a polysilicon fatigue structure are measured in a vacuum environment. Finite element models of the structure are used to identify the source of geometric nonlinearity leading to a Duffing-type cubic stiffness. Given the origin of the behavior, a parametric optimization strategy is performed to minimize the cubic stiffness. This study highlights the importance of considering the dynamic behavior when designing resonating structures, especially when they are used for mechanistic studies in various environments.

Research Area(s)

  • Duffing behavior, Fatigue testing, MEMS resonator

Citation Format(s)

The effects of cubic stiffness on fatigue characterization resonator performance. / Budnitzki, M.; Scates, M.C.; Ritchie, R.O. et al.
In: Sensors and Actuators, A: Physical, Vol. 157, No. 2, 02.2010, p. 228-234.

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review