The Characteristics of the Third Generation Multipurpose Plasma Immersion Ion Implantation Equipment

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Publication status	Published - Jun 2000
Event	International Symposium on Material Science and Technology (ISMST' 2000) - Harbin, China Duration: 5 Jun 2000 → 6 Jun 2000

Conference	International Symposium on Material Science and Technology (ISMST' 2000)
Place	China
City	Harbin
Period	5/06/00 → 6/06/00

Other Access Options

@conference{77ccb4b6dd0043a0b29acd5639f5ed18,

title = "The Characteristics of the Third Generation Multipurpose Plasma Immersion Ion Implantation Equipment",

author = "Tang, \{B. Y.\} and Wang, \{X. F.\} and Wang, \{S. Y.\} and Wang, \{L. P.\} and Chu, \{P. K.\}",

year = "2000",

month = jun,

language = "English",

note = "International Symposium on Material Science and Technology (ISMST' 2000) ; Conference date: 05-06-2000 Through 06-06-2000",

}

The Characteristics of the Third Generation Multipurpose Plasma Immersion Ion Implantation Equipment. / Tang, B. Y. ; Wang, X. F.; Wang, S. Y. et al.
2000. Paper presented at International Symposium on Material Science and Technology (ISMST' 2000), Harbin, China.

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

TY - CONF

T1 - The Characteristics of the Third Generation Multipurpose Plasma Immersion Ion Implantation Equipment

AU - Tang, B. Y.

AU - Wang, X. F.

AU - Wang, S. Y.

AU - Wang, L. P.

AU - Chu, P. K.

PY - 2000/6

Y1 - 2000/6

M3 - RGC 32 - Refereed conference paper (without host publication)

T2 - International Symposium on Material Science and Technology (ISMST' 2000)

Y2 - 5 June 2000 through 6 June 2000

ER -