Texture, microstructure, and tribological behavior in TiAlN/SiNx multilayers

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

  • Yu Chen Chan
  • Hsien Wei Chen
  • Jenq-Gong Duh
  • Jyh Wei Lee

Detail(s)

Original languageEnglish
Pages (from-to)611-617
Journal / PublicationInternational Journal of Applied Ceramic Technology
Volume11
Issue number3
Online published23 Apr 2013
Publication statusPublished - May 2014
Externally publishedYes

Abstract

TiAlN/SiNx multilayers were fabricated by RF reactive magnetron sputtering. Characterizations by TEM, dark-field images, and SEM revealed the dependence for the thickness of SiNx (lSiNx) on the texture and microstructure evolution in multilayers. Epitaxial stabilization in multilayer ameliorated the hardness and H/E ratio. With increasing the lSiNx, the amorphous SiNx altered the coherent interfaces and the superlattice structure, leading to an appreciable decrease in hardness. Nevertheless, this fine-grained coating exhibited superior resistance to plastic deformation. In the ball-on-disk wear tests, the observation of coefficient of friction, worn surfaces, and cross-sectional worn scars verified that multilayers showed better tribological resistance than that of TiAlN monolayer. Two antiwear mechanisms on the basis of hardness variation and microstructure evolution were proposed to elucidate the favorable durability of TiAlN/SiN x multilayers with various lSiNx.

Citation Format(s)

Texture, microstructure, and tribological behavior in TiAlN/SiNx multilayers. / Chan, Yu Chen; Chen, Hsien Wei; Duh, Jenq-Gong; Lee, Jyh Wei.

In: International Journal of Applied Ceramic Technology, Vol. 11, No. 3, 05.2014, p. 611-617.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review