System-level simulation of a micromachined electrometer using a time-domain variable capacitor circuit model

Engineering

• Time Domain 100%
• Circuit Model 100%
• Microelectromechanical System 100%
• Capacitive 66%
• Room Temperature 33%
• Good Agreement 33%
• Ambient Pressure 33%
• Equivalent Circuit 33%
• Circuit Simulation 33%
• Mechanical Structure 33%
• SPICE 33%
• Design Optimization 33%
• Interface Electronics 33%
• Voltage Source 33%
• Mechanical Sensor 33%
• Noise Floor 33%
• Simulation Interface 33%
• Electrical Domain 33%