一種製備厚度可控氮化碳薄膜的合成裝置

Research output: Patents, Agreements and Assignments (RGC: 51, 52, 53)51_Patents granted (CityU only, data source from KTO)

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Detail(s)

Original languageChinese (Traditional)
Patent numberZL201821526519.3
Filing number201821526519.3
Publication status
  • Accepted/In press/Filed - 17 Sep 2018
  • Published - 30 Apr 2019

Citation Format(s)

一種製備厚度可控氮化碳薄膜的合成裝置. / XIONG, Wei (Inventor); ZHANG, Ruiqin (Inventor).

Patent No.: ZL201821526519.3. Apr 30, 2019.

Research output: Patents, Agreements and Assignments (RGC: 51, 52, 53)51_Patents granted (CityU only, data source from KTO)