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Synthesis of Zr Doped NiO Layers on NiSi2/Si-MCP Structures for Supercapacitors

  • Linling Gu
  • , Tao Liu
  • , Fei Wang
  • , Shaohui Xu
  • , Lianwei Wang
  • , Paul K Chu

    Research output: Conference PapersRGC 32 - Refereed conference paper (without host publication)peer-review

    Abstract

    Three-dimensional supercapacitors consisting of NiSi2/silicon microchannel plates (MCPs) with Zr doped NiO layers have been fabricated. The silicon MCPs produced by electrochemical etching is utilized as a backbone of the 3D structure. Nickle layer was deposited on silicon MCP by electroless chemical deposition. The active Zr doped NiO film and NiSi2 layer are synthesized on the surface of the Si-MCP by annealing the backbone coated by a Zr doped nickel layer under oxygen at 500°C. The multi-layered electrode materials are characterized by field emission scanning electron microscopy (FESEM) and the electrochemical properties are determined by cyclic voltammetry (CV). In addition, the electrochemical properties of the NiSi2/silicon MCP structure with pure NiO layers and the NiSi2/silicon MCP structure with Zr doped NiO layers are compared.
    Original languageEnglish
    Publication statusPublished - Apr 2012
    Event2nd international Conference on Electric Information and Control Engineering (ICEICE 2012) - Lushan, China
    Duration: 6 Apr 20128 Apr 2012

    Conference

    Conference2nd international Conference on Electric Information and Control Engineering (ICEICE 2012)
    Abbreviated titleICEICE 2012
    PlaceChina
    CityLushan
    Period6/04/128/04/12

    Research Keywords

    • Zr doped NiO
    • Electrochemical properties
    • Silicon microchannel plate

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