Synthesis of Titanium Oxide Films by Metal Plasma Immersion Ion Implantation

H. Sun, Y.X. Leng, P. Yang, J.Y. Chen, J. Wang, G.J. Wan, X.B. Tian, L.P. Wang, P.K. Chu, N. Huang

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Publication status	Published - May 2001
Event	International Conference on Metallurgical Coatings and Thin Films 2001 - Town and Country Hotel, San Diego, United States Duration: 30 Apr 2001 → 4 May 2001

Conference	International Conference on Metallurgical Coatings and Thin Films 2001
Country/Territory	United States
City	San Diego
Period	30/04/01 → 4/05/01

Other Access Options

@conference{54d1a3a4386d40e18cb7f45af7f59c68,

title = "Synthesis of Titanium Oxide Films by Metal Plasma Immersion Ion Implantation",

author = "H. Sun and Y.X. Leng and P. Yang and J.Y. Chen and J. Wang and G.J. Wan and X.B. Tian and L.P. Wang and P.K. Chu and N. Huang",

year = "2001",

month = may,

language = "English",

note = "International Conference on Metallurgical Coatings and Thin Films 2001<br/> ; Conference date: 30-04-2001 Through 04-05-2001",

}

TY - CONF

T1 - Synthesis of Titanium Oxide Films by Metal Plasma Immersion Ion Implantation

AU - Sun, H.

AU - Leng, Y.X.

AU - Yang, P.

AU - Chen, J.Y.

AU - Wang, J.

AU - Wan, G.J.

AU - Tian, X.B.

AU - Wang, L.P.

AU - Chu, P.K.

AU - Huang, N.

PY - 2001/5

Y1 - 2001/5

UR - http://www.cityu.edu.hk/phy/appkchu/Publications/2001/01.C10.pdf

M3 - RGC 32 - Refereed conference paper (without host publication)

T2 - International Conference on Metallurgical Coatings and Thin Films 2001<br/>

Y2 - 30 April 2001 through 4 May 2001

ER -