Synthesis of silicon-on-Insulator (SOI) by direct-current (DC) hydrogen plasma immersion ion implantation (PIII)

Y. Fu; X. C. Zeng; D. T. K. Kwok; W. L. Liu; P. K. Chu

Synthesis of silicon-on-Insulator (SOI) by direct-current (DC) hydrogen plasma immersion ion implantation (PIII)

Y. Fu
, X. C. Zeng
, D. T. K. Kwok
, W. L. Liu
, P. K. Chu

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Publication status	Published - Oct 2001
Event	6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Shanghai, China Duration: 22 Oct 2001 → 25 Oct 2001

Conference

Conference	6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001
Place	China
City	Shanghai
Period	22/10/01 → 25/10/01

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Publication information for this record has been verified with the author(s) concerned.

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@conference{97758487e1654e03825120544353074f,

title = "Synthesis of silicon-on-Insulator (SOI) by direct-current (DC) hydrogen plasma immersion ion implantation (PIII)",

author = "Y. Fu and Zeng, \{X. C.\} and Kwok, \{D. T. K.\} and Liu, \{W. L.\} and Chu, \{P. K.\}",

note = "Publication information for this record has been verified with the author(s) concerned. ; 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 ; Conference date: 22-10-2001 Through 25-10-2001",

year = "2001",

month = oct,

language = "English",

}

Synthesis of silicon-on-Insulator (SOI) by direct-current (DC) hydrogen plasma immersion ion implantation (PIII). / Fu, Y.; Zeng, X. C.; Kwok, D. T. K. et al.
2001. Paper presented at 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001, Shanghai, China.

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

TY - CONF

T1 - Synthesis of silicon-on-Insulator (SOI) by direct-current (DC) hydrogen plasma immersion ion implantation (PIII)

AU - Fu, Y.

AU - Zeng, X. C.

AU - Kwok, D. T. K.

AU - Liu, W. L.

AU - Chu, P. K.

N1 - Publication information for this record has been verified with the author(s) concerned.

PY - 2001/10

Y1 - 2001/10

M3 - RGC 32 - Refereed conference paper (without host publication)

T2 - 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001

Y2 - 22 October 2001 through 25 October 2001

ER -