Synthesis of nanocrystalline diamond by the direct ion beam deposition method

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

  • X. S. Sun
  • N. Wang
  • H. K. Woo
  • X. D. Han
  • I. Bello
  • S. T. Lee

Detail(s)

Original languageEnglish
Pages (from-to)3204-3207
Journal / PublicationJournal of Materials Research
Volume14
Issue number8
Publication statusPublished - Aug 1999

Abstract

Nanocrystalline diamond has been synthesized on a mirror-polished Si(001) substrate by means of direct ion beam deposition. Low-energy (80-200 eV) hydrocarbon and hydrogen ions, generated in a Kaufman ion source, were used to bombard the substrates. The bombarded samples were characterized by high-resolution transmission electron microscopy and Raman spectroscopy. Nanocrystalline diamond particles of random orientation were observed in a matrix of amorphous carbon film on the Si(001) substrate. The size of the nanocrystalline diamond particles varied in the range of 50-300 angstroms. The mechanism of ion-induced formation of nanocrystalline diamond is discussed.

Citation Format(s)

Synthesis of nanocrystalline diamond by the direct ion beam deposition method. / Sun, X. S.; Wang, N.; Zhang, W. J. et al.
In: Journal of Materials Research, Vol. 14, No. 8, 08.1999, p. 3204-3207.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review