Synthesis of layer-tunable graphene : A combined kinetic implantation and thermal ejection approach

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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  • Gang Wang
  • Miao Zhang
  • Su Liu
  • Xiaoming Xie
  • Guqiao Ding
  • Yongqiang Wang
  • Heng Gao
  • Wei Ren
  • Qinghong Yuan
  • Peihong Zhang
  • Xi Wang
  • Zengfeng Di


Original languageEnglish
Pages (from-to)3666-3675
Journal / PublicationAdvanced Functional Materials
Issue number24
Online published4 May 2015
Publication statusPublished - Jun 2015


Layer-tunable graphene has attracted broad interest for its potentials in nanoelectronics applications. However, synthesis of layer-tunable graphene by using traditional chemical vapor deposition method still remains a great challenge due to the complex experimental parameters and the carbon precipitation process. Herein, by performing ion implantation into a Ni/Cu bilayer substrate, the number of graphene layers, especially single or double layer, can be controlled precisely by adjusting the carbon ion implant fluence. The growth mechanism of the layer-tunable graphene is revealed by monitoring the growth process, it is observed that the entire implanted carbon atoms can be expelled toward the substrate surface and thus graphene with designed layer number can be obtained. Such a growth mechanism is further confirmed by theoretical calculations. The proposed approach for the synthesis of layer-tunable graphene offers more flexibility in the experimental conditions. Being a core technology in microelectronics processing, ion implantation can be readily implemented in production lines and is expected to expedite the application of graphene to nanoelectronics. By taking advantage of the dual metal substrate of Ni-coated Cu foils, the precise control of layer number of graphene by ion implantation is demonstrated and the layer number of graphene strictly corresponds to the implantation fluence as expected. Besides, the formation mechanism is explored by the experimental analysis in detail and confirmed by the theoretical calculations.

Research Area(s)

  • graphene, growth mechanism, ion implantation, layer-tunable, theoretical calculation

Citation Format(s)

Synthesis of layer-tunable graphene: A combined kinetic implantation and thermal ejection approach. / Wang, Gang; Zhang, Miao; Liu, Su et al.
In: Advanced Functional Materials, Vol. 25, No. 24, 06.2015, p. 3666-3675.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review