Synthesis and Properties of Ti-O/Ti-N Duplex Films Containing Ta

Jun-Ying CHEN; Yong-Xiang LENG; Ping YANG; Hong SUN; Paul Chu; Nan  HUANG

Synthesis and Properties of Ti-O/Ti-N Duplex Films Containing Ta

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45) › 32_Refereed conference paper (with ISBN/ISSN) › peer-review

Overview

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Author(s)

Jun-Ying CHEN
Yong-Xiang LENG
Ping YANG
Hong SUN
Nan HUANG

Related Research Unit(s)

Department of Physics

Detail(s)

Original language	English
Title of host publication	5^th Asia-Pacific Conference on Plasma Science & Technology and 13^th Symposium on Plasma Science for Materials
Subtitle of host publication	BOOK OF ABSTRACTS
Publication status	Published - Sep 2000

Conference

Title	5^th Asia-Pacific Conference on Plasma Science & Technology and 13^th Symposium on Plasma Science for Materials
Place	China
City	Dalian
Period	10 - 13 September 2000

Link(s)

	Check@CityULib
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(8cd871a8-ecbd-4e66-a664-f81c6734b333).html

Bibliographic Note

Research Unit(s) information for this publication is provided by the author(s) concerned.

Citation Format(s)

[ RIS ] [ BibTeX ]

Synthesis and Properties of Ti-O/Ti-N Duplex Films Containing Ta. / CHEN, Jun-Ying; LENG, Yong-Xiang; YANG, Ping et al.

5^th Asia-Pacific Conference on Plasma Science & Technology and 13^th Symposium on Plasma Science for Materials: BOOK OF ABSTRACTS. 2000.

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45) › 32_Refereed conference paper (with ISBN/ISSN) › peer-review

CHEN, J-Y, LENG, Y-X, YANG, P, SUN, H, Chu, P & HUANG, N 2000, Synthesis and Properties of Ti-O/Ti-N Duplex Films Containing Ta. in 5^th Asia-Pacific Conference on Plasma Science & Technology and 13^th Symposium on Plasma Science for Materials: BOOK OF ABSTRACTS. 5^th Asia-Pacific Conference on Plasma Science & Technology and 13^th Symposium on Plasma Science for Materials, Dalian, China, 10/09/00.

CHEN, J-Y., LENG, Y-X., YANG, P., SUN, H., Chu, P., & HUANG, N. (2000). Synthesis and Properties of Ti-O/Ti-N Duplex Films Containing Ta. In 5^th Asia-Pacific Conference on Plasma Science & Technology and 13^th Symposium on Plasma Science for Materials: BOOK OF ABSTRACTS

CHEN J-Y, LENG Y-X, YANG P, SUN H, Chu P, HUANG N. Synthesis and Properties of Ti-O/Ti-N Duplex Films Containing Ta. In 5^th Asia-Pacific Conference on Plasma Science & Technology and 13^th Symposium on Plasma Science for Materials: BOOK OF ABSTRACTS. 2000

CHEN, Jun-Ying ; LENG, Yong-Xiang ; YANG, Ping et al. / Synthesis and Properties of Ti-O/Ti-N Duplex Films Containing Ta. 5^th Asia-Pacific Conference on Plasma Science & Technology and 13^th Symposium on Plasma Science for Materials: BOOK OF ABSTRACTS. 2000.