Synthesis and mechanical properties of cubic boron nitride/nanodiamond composite films

Yat-Ming Chong; Kwok-Leung Ma; Kar-Man Leung; Chit-Yiu Chan; Qing Ye; Igor Bello; Wenjun Zhang; Shuit-Tong Lee

doi:10.1002/cvde.200506422

Synthesis and mechanical properties of cubic boron nitride/nanodiamond composite films

Yat-Ming Chong, Kwok-Leung Ma, Kar-Man Leung, Chit-Yiu Chan, Qing Ye, Igor Bello, Wenjun Zhang, Shuit-Tong Lee

Centre of Super-Diamond and Advanced Films

Research output: Journal Publications and Reviews › RGC 62 - Review of books or of software (or similar publications/items) › peer-review

35 Citations (Scopus)

Abstract

Large-area cubic boron nitride/nanocrystalline diamond (cBN/ND) composite films were deposited on silicon substrates using plasma-assisted (PA) CVD processes, and a systematic study of their mechanical properties was carried out. The direct growth of cBN on ND without an amorphous and turbostratic BN interfacial layer dramatically improves the adherence of cBN films. Because of the strengthened adhesion and improved mechanical properties due to the layered structure and the smooth surface, the composite films could be used in mechanical and some device applications. © 2006 WILEY-VCH Verlag GmbH & Co. KGaA.

Original language	English
Pages (from-to)	33-38
Journal	Chemical Vapor Deposition
Volume	12
Issue number	1
DOIs	https://doi.org/10.1002/cvde.200506422
Publication status	Published - Jan 2006

Research Keywords

Composite films
Cubic boron nitride
Mechanical properties
Nanodiamond

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10.1002/cvde.200506422

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abstract = "Large-area cubic boron nitride/nanocrystalline diamond (cBN/ND) composite films were deposited on silicon substrates using plasma-assisted (PA) CVD processes, and a systematic study of their mechanical properties was carried out. The direct growth of cBN on ND without an amorphous and turbostratic BN interfacial layer dramatically improves the adherence of cBN films. Because of the strengthened adhesion and improved mechanical properties due to the layered structure and the smooth surface, the composite films could be used in mechanical and some device applications. {\textcopyright} 2006 WILEY-VCH Verlag GmbH & Co. KGaA.",

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T1 - Synthesis and mechanical properties of cubic boron nitride/nanodiamond composite films

AU - Chong, Yat-Ming

AU - Ma, Kwok-Leung

AU - Leung, Kar-Man

AU - Chan, Chit-Yiu

AU - Ye, Qing

AU - Bello, Igor

AU - Zhang, Wenjun

AU - Lee, Shuit-Tong

PY - 2006/1

Y1 - 2006/1

N2 - Large-area cubic boron nitride/nanocrystalline diamond (cBN/ND) composite films were deposited on silicon substrates using plasma-assisted (PA) CVD processes, and a systematic study of their mechanical properties was carried out. The direct growth of cBN on ND without an amorphous and turbostratic BN interfacial layer dramatically improves the adherence of cBN films. Because of the strengthened adhesion and improved mechanical properties due to the layered structure and the smooth surface, the composite films could be used in mechanical and some device applications. © 2006 WILEY-VCH Verlag GmbH & Co. KGaA.

AB - Large-area cubic boron nitride/nanocrystalline diamond (cBN/ND) composite films were deposited on silicon substrates using plasma-assisted (PA) CVD processes, and a systematic study of their mechanical properties was carried out. The direct growth of cBN on ND without an amorphous and turbostratic BN interfacial layer dramatically improves the adherence of cBN films. Because of the strengthened adhesion and improved mechanical properties due to the layered structure and the smooth surface, the composite films could be used in mechanical and some device applications. © 2006 WILEY-VCH Verlag GmbH & Co. KGaA.

KW - Composite films

KW - Cubic boron nitride

KW - Mechanical properties

KW - Nanodiamond

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DO - 10.1002/cvde.200506422

M3 - RGC 62 - Review of books or of software (or similar publications/items)

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EP - 38

JO - Chemical Vapor Deposition

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Synthesis and mechanical properties of cubic boron nitride/nanodiamond composite films

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