Synthesis and characterization of fluorinated β-ketoiminate and imino-alcoholate Pd complexes : Precursors for palladium chemical vapor deposition

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

  • Yan-Hsiu Liu
  • Yi-Ching Cheng
  • Yung-Liang Tung
  • Yao-Lun Chen
  • Chao-Shiuan Liu
  • Shie-Ming Peng
  • Gene-Hsiang Lee

Detail(s)

Original languageEnglish
Pages (from-to)135-142
Journal / PublicationJournal of Materials Chemistry
Volume13
Issue number1
Online published18 Nov 2002
Publication statusPublished - 2003
Externally publishedYes

Abstract

The design and synthesis of Pd complexes with two β-ketoiminate or with two imino-alcoholate chelate ligands is reported. In order to establish their structures in the solid-state, methoxyethyl substituted complexes 1c and 2c were characterized by single crystal X-ray diffraction, showing a square-planar local coordination for the Pd atom, but the β-ketoiminate ligands of 1c gave a bent basal plane involving two chelating hexagons, which was in sharp contrast to the boat configuration of the imino-alcoholate ligands observed in the second complex 2c. Chemical vapor deposition (CVD) experiments were conducted at deposition temperatures of 250–350 °C. Scanning electron micrographs (SEM) were taken to reveal the surface morphologies and grain sizes of the Pd metal thin films. The resulting thin films were found to contain a low level of carbon and oxygen impurities using O2 as the carrier gas, as measured by X-ray photoelectron spectroscopy (XPS).

Citation Format(s)

Synthesis and characterization of fluorinated β-ketoiminate and imino-alcoholate Pd complexes : Precursors for palladium chemical vapor deposition. / Liu, Yan-Hsiu; Cheng, Yi-Ching; Tung, Yung-Liang; Chi, Yun; Chen, Yao-Lun; Liu, Chao-Shiuan; Peng, Shie-Ming; Lee, Gene-Hsiang.

In: Journal of Materials Chemistry, Vol. 13, No. 1, 2003, p. 135-142.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review