Surface resonance properties of pure Cu and Cu₈₀Zr₂₀ metallic glass films with nanoparticles induced by pulsed-laser dewetting process

Pure Cu and Cu₈₀Zr₂₀ thin films with a thickness of 10 nm were deposited on glass substrates using a high-vacuum sputtering system. A pulsed-laser dewetting process was then performed using a NIR laser system. For the pure Cu film, nanoparticles were produced for the accumulated energy (AE) densities in the range of 0.6–11 J/cm². The particle size was found to increase with increasing scanning speed and repetition rate, and with decreasing power. For the Cu₈₀Zr₂₀ thin film, nanoparticles were formed under all AE values under consideration. The nanoparticles consisted almost entirely of Cu; with the Zr atoms being repelled to the bottom of the nanoparticle and surroundings. The optical absorption peak wavelengths for the Cu and Cu₈₀Zr₂₀ films produced under different dewetting conditions all lay in the range of 580–700 nm. Hence, it was inferred that the nanoparticles produced in the two films had a similar size, shape and composition.