Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings

Yi-Ruei Lin; Hsin-Ping Wang; Chin-An Lin; Jr-Hau He

doi:10.1063/1.3267147

Author(s)

Yi-Ruei Lin
Hsin-Ping Wang
Chin-An Lin
Jr-Hau He

Detail(s)

Original language	English
Article number	114310
Journal / Publication	Journal of Applied Physics
Volume	106
Issue number	11
Publication status	Published - 1 Dec 2009
Externally published	Yes

Link(s)

DOI	DOI https://doi.org/10.1063/1.3267147 Final Published version
	Check@CityULib
Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-72449209716&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(cfc32903-cdb1-49cd-abef-d648b90f93b8).html

Abstract

We demonstrate the fabrication of surface profile-controlled close-packed Si nanorod arrays (NRAs), using a scalable and integrated circuit compatible process combining colloidal lithography and reactive ion etching. Si NRAs exhibit broadband, omnidirectional, and polarization-insensitive antireflection (AR) properties and enhance the hydrophobicity. The effect of surface profiles of periodic NRAs on the AR and hydrophobicity was investigated systematically. The Si NRAs function as both self-cleaning and AR layers, which offer a promising approach to enhance the solar cell energy conversion efficiency.

Research Area(s)

SDG 7 - Affordable and Clean Energy

Citation Format(s)

[ RIS ] [ BibTeX ]

Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings. / Lin, Yi-Ruei; Wang, Hsin-Ping; Lin, Chin-An et al.
In: Journal of Applied Physics, Vol. 106, No. 11, 114310, 01.12.2009.

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Lin, Y-R, Wang, H-P, Lin, C-A & He, J-H 2009, 'Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings', Journal of Applied Physics, vol. 106, no. 11, 114310. https://doi.org/10.1063/1.3267147

Lin, Y.-R., Wang, H.-P., Lin, C.-A., & He, J.-H. (2009). Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings. Journal of Applied Physics, 106(11), Article 114310. https://doi.org/10.1063/1.3267147

Lin YR, Wang HP, Lin CA, He JH. Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings. Journal of Applied Physics. 2009 Dec 1;106(11):114310. doi: 10.1063/1.3267147

Lin, Yi-Ruei ; Wang, Hsin-Ping ; Lin, Chin-An et al. / Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings. In: Journal of Applied Physics. 2009 ; Vol. 106, No. 11.