Surface microstructure analysis of cubic boron nitride films by transmission electron microscopy

X. M. Meng; W. J. Zhang; C. Y. Chan; C. S. Lee; I. Bello; S. T. Lee

doi:10.1063/1.2165288

Surface microstructure analysis of cubic boron nitride films by transmission electron microscopy

X. M. Meng, W. J. Zhang, C. Y. Chan, C. S. Lee, I. Bello, S. T. Lee

Centre of Super-Diamond and Advanced Films

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

12 Citations (Scopus)

Abstract

A simple coating technique was introduced to preserve the surface structure of samples for transmission electron microscopy (TEM) characterization, and used to study boron nitride (BN) films. A gold film precoated on the surface of BN films served to protect the BN surface against ion damages during sample preparation, and to separate and distinguish the film surface structure from the TEM glue. The technique enabled the observation of detailed surface microstructures of cubic BN (cBN) films, which provided direct evidences for understanding cBN growth mechanisms. The TEM sample technique is expected to be generally applicable to other film systems, particularly those with an amorphous topmost layer. © 2006 American Institute of Physics.

Original language	English
Article number	31904
Pages (from-to)	1-3
Journal	Applied Physics Letters
Volume	88
Issue number	3
DOIs	https://doi.org/10.1063/1.2165288
Publication status	Published - 2006

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abstract = "A simple coating technique was introduced to preserve the surface structure of samples for transmission electron microscopy (TEM) characterization, and used to study boron nitride (BN) films. A gold film precoated on the surface of BN films served to protect the BN surface against ion damages during sample preparation, and to separate and distinguish the film surface structure from the TEM glue. The technique enabled the observation of detailed surface microstructures of cubic BN (cBN) films, which provided direct evidences for understanding cBN growth mechanisms. The TEM sample technique is expected to be generally applicable to other film systems, particularly those with an amorphous topmost layer. {\textcopyright} 2006 American Institute of Physics.",

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AU - Meng, X. M.

AU - Zhang, W. J.

AU - Chan, C. Y.

AU - Lee, C. S.

AU - Bello, I.

AU - Lee, S. T.

PY - 2006

Y1 - 2006

N2 - A simple coating technique was introduced to preserve the surface structure of samples for transmission electron microscopy (TEM) characterization, and used to study boron nitride (BN) films. A gold film precoated on the surface of BN films served to protect the BN surface against ion damages during sample preparation, and to separate and distinguish the film surface structure from the TEM glue. The technique enabled the observation of detailed surface microstructures of cubic BN (cBN) films, which provided direct evidences for understanding cBN growth mechanisms. The TEM sample technique is expected to be generally applicable to other film systems, particularly those with an amorphous topmost layer. © 2006 American Institute of Physics.

AB - A simple coating technique was introduced to preserve the surface structure of samples for transmission electron microscopy (TEM) characterization, and used to study boron nitride (BN) films. A gold film precoated on the surface of BN films served to protect the BN surface against ion damages during sample preparation, and to separate and distinguish the film surface structure from the TEM glue. The technique enabled the observation of detailed surface microstructures of cubic BN (cBN) films, which provided direct evidences for understanding cBN growth mechanisms. The TEM sample technique is expected to be generally applicable to other film systems, particularly those with an amorphous topmost layer. © 2006 American Institute of Physics.

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DO - 10.1063/1.2165288

M3 - RGC 21 - Publication in refereed journal

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SP - 1

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JO - Applied Physics Letters

JF - Applied Physics Letters

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Surface microstructure analysis of cubic boron nitride films by transmission electron microscopy

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