Super-resolution Monitoring of React-on-demand Photo-assisted Electrochemical Printing via Microsphere Nanoscopy

Pan Li, Haibo Yu, Feifei Wang, Gwo-Bin Lee, Lianqing Liu*, Wen Jung Li*

*Corresponding author for this work

    Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review

    1 Citation (Scopus)

    Abstract

    Nanoscale material surface patterning on semiconductor requires multi-scale measurements for the determination of their geometric dimensions and shapes. In this paper, we propose an in-situ, real-time super-resolution imaging technique using a simple microsphere microlens to monitor the dynamic process of photo-assisted electrochemical printing in a microfluidic chip. The microsphere microlens with diameters of 30 60 μ m were set close to a semiconductor surface to image the electrochemical printing process underneath. With the microsphere-based imaging system, both the depositing process of silver nanoparticles with 200 nm 300 nm in diameter and the growing process of silver belts were observed. Also, we experimentally observed how a typical 120° angle formed at the terminal of a silver belt through the microsphere superlens. Super-resolution monitoring ability provided by microsphere lens will shine a light on the sub-diffraction process of micro/nano fabrication.
    Original languageEnglish
    Title of host publicationProceedings of the 2nd IEEE International Conference on Micro/Nano Sensors for AI, Healthcare and Robotics
    PublisherIEEE
    Pages63-67
    ISBN (Electronic)9781728166520, 9781728166513
    ISBN (Print)9781728166537
    DOIs
    Publication statusPublished - Oct 2019
    Event2nd IEEE International Conference on Micro/Nano Sensors for Al, Healthcare, and Robotics (IEEE-NSENS 2019) - Sheraton Shenzhen Futian Hotel, Shenzhen, China
    Duration: 31 Oct 20192 Nov 2019
    https://ieeenano.org/2019/ieee-international-conference-on-micro-nano-sensors-for-ai-healthcare-and-robotics-ieee-nsens

    Publication series

    NameNSENS - IEEE International Conference on Micro/Nano Sensors for Al, Healthcare, and Robotics

    Conference

    Conference2nd IEEE International Conference on Micro/Nano Sensors for Al, Healthcare, and Robotics (IEEE-NSENS 2019)
    Abbreviated titleIEEE-NSENS 2019
    Country/TerritoryChina
    CityShenzhen
    Period31/10/192/11/19
    Internet address

    Research Keywords

    • dielectric microsphere nanoscopy
    • micro/nanofabrication
    • real-time
    • super-resolution imaging

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