Abstract
Nanoscale material surface patterning on semiconductor requires multi-scale measurements for the determination of their geometric dimensions and shapes. In this paper, we propose an in-situ, real-time super-resolution imaging technique using a simple microsphere microlens to monitor the dynamic process of photo-assisted electrochemical printing in a microfluidic chip. The microsphere microlens with diameters of 30 60 μ m were set close to a semiconductor surface to image the electrochemical printing process underneath. With the microsphere-based imaging system, both the depositing process of silver nanoparticles with 200 nm 300 nm in diameter and the growing process of silver belts were observed. Also, we experimentally observed how a typical 120° angle formed at the terminal of a silver belt through the microsphere superlens. Super-resolution monitoring ability provided by microsphere lens will shine a light on the sub-diffraction process of micro/nano fabrication.
Original language | English |
---|---|
Title of host publication | Proceedings of the 2nd IEEE International Conference on Micro/Nano Sensors for AI, Healthcare and Robotics |
Publisher | IEEE |
Pages | 63-67 |
ISBN (Electronic) | 9781728166520, 9781728166513 |
ISBN (Print) | 9781728166537 |
DOIs | |
Publication status | Published - Oct 2019 |
Event | 2nd IEEE International Conference on Micro/Nano Sensors for Al, Healthcare, and Robotics (IEEE-NSENS 2019) - Sheraton Shenzhen Futian Hotel, Shenzhen, China Duration: 31 Oct 2019 → 2 Nov 2019 https://ieeenano.org/2019/ieee-international-conference-on-micro-nano-sensors-for-ai-healthcare-and-robotics-ieee-nsens |
Publication series
Name | NSENS - IEEE International Conference on Micro/Nano Sensors for Al, Healthcare, and Robotics |
---|
Conference
Conference | 2nd IEEE International Conference on Micro/Nano Sensors for Al, Healthcare, and Robotics (IEEE-NSENS 2019) |
---|---|
Abbreviated title | IEEE-NSENS 2019 |
Country/Territory | China |
City | Shenzhen |
Period | 31/10/19 → 2/11/19 |
Internet address |
Research Keywords
- dielectric microsphere nanoscopy
- micro/nanofabrication
- real-time
- super-resolution imaging