Summary Abstract : Current metallization issues in microelectronic devices

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

2 Scopus Citations
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Detail(s)

Original languageEnglish
Pages (from-to)216-217
Journal / PublicationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume2
Issue number2
Publication statusPublished - Apr 1984
Externally publishedYes

Bibliographic Note

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