Substrate bias effects on mechanical and tribological properties of nanoscale multilayer CrTiAlN coatings prepared by closed field unbalanced magnetron sputtering ion plating method

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

Detail(s)

Original languageEnglish
Pages (from-to)885-888
Journal / PublicationKey Engineering Materials
Volume334-335 II
Publication statusPublished - 2007

Abstract

Nanoscale multilayer CrTiAlN coatings were deposited on M42 tool steel by reactive close-field unbalanced magnetron sputtering ion plating process under Ar-N2 gas mixture. The effects of substrate negative bias voltages (Vb) on the mechanical and tribological properties have been studied by applying bias voltages from -50V to -100V during deposition. The above properties were characterized by microhardness tester, scratch tester, Rockwell-C indenter, and ball-on-disk tribometer. The results showed that the coating hardness increased significantly from Vb= - 50V (7 GPa) to Vb = - 70V (34 GPa). Further increase of the bias voltages led to a decrease of hardness. The wear tests showed that the friction coefficient of the coatings was around 0.3 to 0.5, while excellent wear performance of the coatings only found at Vb between -60 and -80V (10 -17m3/Nm). Adhesion tests also showed coating deposited at -60V to - 80V had excellet adhesive strength.

Research Area(s)

  • Ball-on-disc, CiTiAlN coatings, Hardness

Citation Format(s)

Substrate bias effects on mechanical and tribological properties of nanoscale multilayer CrTiAlN coatings prepared by closed field unbalanced magnetron sputtering ion plating method. / Tam, P. L.; Shum, P. W.; Zhou, Z. F.; Li, K. Y.

In: Key Engineering Materials, Vol. 334-335 II, 2007, p. 885-888.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review