Submicron processing using laser-induced photonic nanojet

Yangdong Wen; Feifei Wang; Haibo Yu; Yuechao Wang; Lianqing Liu; Wen Jung Li

doi:10.1109/NANO.2017.8117311

Submicron processing using laser-induced photonic nanojet

Yangdong Wen
, Feifei Wang
, Haibo Yu
, Yuechao Wang
, Lianqing Liu^*
, Wen Jung Li^*

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

1 Citation (Scopus)

Abstract

In this paper, we propose a novel laser-induced photonic nanojet for micro/nanofabrication. The full width at half maximum of the nanojet is smaller than the diffraction limit, thus allowing for the fabrication of structures at the submicron scale. We first developed the experimental nanojet system, which consists of a laser source, an objective lens, a charge-coupled device camera, and a mobile platform capable of three-dimensional movement. Further, the experimental conditions were optimized by simulating the nanojet. The results showed that submicron features could be created successfully on gold electrodes. Thus far, it has been possible to form features as narrow as approximately 300 nm.

Original language	English
Title of host publication	2017 IEEE 17th International Conference on Nanotechnology (IEEE-NANO)
Publisher	IEEE
Pages	940-941
ISBN (Electronic)	9781509030286
ISBN (Print)	9781509030293
DOIs	https://doi.org/10.1109/NANO.2017.8117311
Publication status	Published - Jul 2017
Event	17th IEEE International Conference on Nanotechnology (IEEE NANO 2017) - Pittsburgh Marriott City Center, Pittsburgh, United States Duration: 25 Jul 2017 → 28 Jul 2017 http://2017.ieeenano.org/ https://nano.papercept.net/conferences/conferences/NANO17/program/NANO17_ContentListWeb_4.html

Publication series

Name	Proceedings of the IEEE Conference on Nanotechnology
Volume	2017
ISSN (Electronic)	1944-9380

Conference

Conference	17th IEEE International Conference on Nanotechnology (IEEE NANO 2017)
Abbreviated title	NANO 2017
Place	United States
City	Pittsburgh
Period	25/07/17 → 28/07/17
Internet address	http://2017.ieeenano.org/ https://nano.papercept.net/conferences/conferences/NANO17/program/NANO17_ContentListWeb_4.html

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This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

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@inproceedings{570252a058c946fca9ee75706e634167,

title = "Submicron processing using laser-induced photonic nanojet",

abstract = "In this paper, we propose a novel laser-induced photonic nanojet for micro/nanofabrication. The full width at half maximum of the nanojet is smaller than the diffraction limit, thus allowing for the fabrication of structures at the submicron scale. We first developed the experimental nanojet system, which consists of a laser source, an objective lens, a charge-coupled device camera, and a mobile platform capable of three-dimensional movement. Further, the experimental conditions were optimized by simulating the nanojet. The results showed that submicron features could be created successfully on gold electrodes. Thus far, it has been possible to form features as narrow as approximately 300 nm.",

author = "Yangdong Wen and Feifei Wang and Haibo Yu and Yuechao Wang and Lianqing Liu and Li, \{Wen Jung\}",

year = "2017",

month = jul,

doi = "10.1109/NANO.2017.8117311",

language = "English",

isbn = "9781509030293",

series = "Proceedings of the IEEE Conference on Nanotechnology",

publisher = "IEEE",

pages = "940--941",

booktitle = "2017 IEEE 17th International Conference on Nanotechnology (IEEE-NANO)",

address = "United States",

note = "17th IEEE International Conference on Nanotechnology (IEEE NANO 2017), NANO 2017 ; Conference date: 25-07-2017 Through 28-07-2017",

url = "http://2017.ieeenano.org/, https://nano.papercept.net/conferences/conferences/NANO17/program/NANO17\_ContentListWeb\_4.html",

}

Wen, Y, Wang, F, Yu, H, Wang, Y, Liu, L & Li, WJ 2017, Submicron processing using laser-induced photonic nanojet. in 2017 IEEE 17th International Conference on Nanotechnology (IEEE-NANO)., 8117311, Proceedings of the IEEE Conference on Nanotechnology, vol. 2017, IEEE, pp. 940-941, 17th IEEE International Conference on Nanotechnology (IEEE NANO 2017), Pittsburgh, Pennsylvania, United States, 25/07/17. https://doi.org/10.1109/NANO.2017.8117311

Submicron processing using laser-induced photonic nanojet. / Wen, Yangdong; Wang, Feifei; Yu, Haibo et al.
2017 IEEE 17th International Conference on Nanotechnology (IEEE-NANO). IEEE, 2017. p. 940-941 8117311 (Proceedings of the IEEE Conference on Nanotechnology; Vol. 2017).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Submicron processing using laser-induced photonic nanojet

AU - Wen, Yangdong

AU - Wang, Feifei

AU - Yu, Haibo

AU - Wang, Yuechao

AU - Liu, Lianqing

AU - Li, Wen Jung

PY - 2017/7

Y1 - 2017/7

N2 - In this paper, we propose a novel laser-induced photonic nanojet for micro/nanofabrication. The full width at half maximum of the nanojet is smaller than the diffraction limit, thus allowing for the fabrication of structures at the submicron scale. We first developed the experimental nanojet system, which consists of a laser source, an objective lens, a charge-coupled device camera, and a mobile platform capable of three-dimensional movement. Further, the experimental conditions were optimized by simulating the nanojet. The results showed that submicron features could be created successfully on gold electrodes. Thus far, it has been possible to form features as narrow as approximately 300 nm.

AB - In this paper, we propose a novel laser-induced photonic nanojet for micro/nanofabrication. The full width at half maximum of the nanojet is smaller than the diffraction limit, thus allowing for the fabrication of structures at the submicron scale. We first developed the experimental nanojet system, which consists of a laser source, an objective lens, a charge-coupled device camera, and a mobile platform capable of three-dimensional movement. Further, the experimental conditions were optimized by simulating the nanojet. The results showed that submicron features could be created successfully on gold electrodes. Thus far, it has been possible to form features as narrow as approximately 300 nm.

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U2 - 10.1109/NANO.2017.8117311

DO - 10.1109/NANO.2017.8117311

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 9781509030293

T3 - Proceedings of the IEEE Conference on Nanotechnology

SP - 940

EP - 941

BT - 2017 IEEE 17th International Conference on Nanotechnology (IEEE-NANO)

PB - IEEE

T2 - 17th IEEE International Conference on Nanotechnology (IEEE NANO 2017)

Y2 - 25 July 2017 through 28 July 2017

ER -

Submicron processing using laser-induced photonic nanojet

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