Sub-wavelength GaN-based membrane high contrast grating reflectors

Tzeng Tsong Wu; Yu Cheng Syu; Shu Hsien Wu; Wei Ting Chen; Tien Chang Lu; Shing Chung Wang; Hai Pang Chiang; Din Ping Tsai

doi:10.1364/OE.20.020551

Sub-wavelength GaN-based membrane high contrast grating reflectors

Tzeng Tsong Wu, Yu Cheng Syu, Shu Hsien Wu, Wei Ting Chen, Tien Chang Lu, Shing Chung Wang, Hai Pang Chiang, Din Ping Tsai

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

42 Citations (Scopus)

Abstract

The GaN-based membrane high contrast grating (HCG) reflectors have been fabricated and investigated. The structural parameters including grating periods, grating height, filling factors and air-gap height were calculated to realize high reflectivity spectra with broad bandwidth by the rigorous coupled-wave analysis and finite-difference time-domain method. Based on the optimized simulation results, the GaN-based membrane HCGs were fabricated by e-beam lithography and focused-ion beam process. The fabricated GaN-based membrane HCG reflectors revealed high reflectivity at 460 nm band with large stopband width of 60 nm in the TE polarization measured by using the micro-reflectivity spectrometer. The experimental results also showed a good agreement with simulated ones. We believe this study will be helpful for development of the GaN-based novel light emitting devices in the blue or UV region. © 2012 Optical Society of America.

Original language	English
Pages (from-to)	20551-20557
Journal	Optics Express
Volume	20
Issue number	18
DOIs	https://doi.org/10.1364/OE.20.020551
Publication status	Published - 27 Aug 2012
Externally published	Yes

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Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

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title = "Sub-wavelength GaN-based membrane high contrast grating reflectors",

abstract = "The GaN-based membrane high contrast grating (HCG) reflectors have been fabricated and investigated. The structural parameters including grating periods, grating height, filling factors and air-gap height were calculated to realize high reflectivity spectra with broad bandwidth by the rigorous coupled-wave analysis and finite-difference time-domain method. Based on the optimized simulation results, the GaN-based membrane HCGs were fabricated by e-beam lithography and focused-ion beam process. The fabricated GaN-based membrane HCG reflectors revealed high reflectivity at 460 nm band with large stopband width of 60 nm in the TE polarization measured by using the micro-reflectivity spectrometer. The experimental results also showed a good agreement with simulated ones. We believe this study will be helpful for development of the GaN-based novel light emitting devices in the blue or UV region. {\textcopyright} 2012 Optical Society of America.",

author = "Wu, {Tzeng Tsong} and Syu, {Yu Cheng} and Wu, {Shu Hsien} and Chen, {Wei Ting} and Lu, {Tien Chang} and Wang, {Shing Chung} and Chiang, {Hai Pang} and Tsai, {Din Ping}",

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T1 - Sub-wavelength GaN-based membrane high contrast grating reflectors

AU - Wu, Tzeng Tsong

AU - Syu, Yu Cheng

AU - Wu, Shu Hsien

AU - Chen, Wei Ting

AU - Lu, Tien Chang

AU - Wang, Shing Chung

AU - Chiang, Hai Pang

AU - Tsai, Din Ping

N1 - Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

PY - 2012/8/27

Y1 - 2012/8/27

N2 - The GaN-based membrane high contrast grating (HCG) reflectors have been fabricated and investigated. The structural parameters including grating periods, grating height, filling factors and air-gap height were calculated to realize high reflectivity spectra with broad bandwidth by the rigorous coupled-wave analysis and finite-difference time-domain method. Based on the optimized simulation results, the GaN-based membrane HCGs were fabricated by e-beam lithography and focused-ion beam process. The fabricated GaN-based membrane HCG reflectors revealed high reflectivity at 460 nm band with large stopband width of 60 nm in the TE polarization measured by using the micro-reflectivity spectrometer. The experimental results also showed a good agreement with simulated ones. We believe this study will be helpful for development of the GaN-based novel light emitting devices in the blue or UV region. © 2012 Optical Society of America.

AB - The GaN-based membrane high contrast grating (HCG) reflectors have been fabricated and investigated. The structural parameters including grating periods, grating height, filling factors and air-gap height were calculated to realize high reflectivity spectra with broad bandwidth by the rigorous coupled-wave analysis and finite-difference time-domain method. Based on the optimized simulation results, the GaN-based membrane HCGs were fabricated by e-beam lithography and focused-ion beam process. The fabricated GaN-based membrane HCG reflectors revealed high reflectivity at 460 nm band with large stopband width of 60 nm in the TE polarization measured by using the micro-reflectivity spectrometer. The experimental results also showed a good agreement with simulated ones. We believe this study will be helpful for development of the GaN-based novel light emitting devices in the blue or UV region. © 2012 Optical Society of America.

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DO - 10.1364/OE.20.020551

M3 - RGC 21 - Publication in refereed journal

C2 - 23037102

SN - 1094-4087

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SP - 20551

EP - 20557

JO - Optics Express

JF - Optics Express

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ER -

Sub-wavelength GaN-based membrane high contrast grating reflectors

Abstract

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