Abstract
In this study, a flexoelectric microphone was, for the first time, designed and fabricated in a bridge structure using barium strontium titanate (Ba0.65Sr0.35TiO3) ceramic and tested afterwards. The prototyped flexoelectric microphone consists of a 1.5 mm 768 μm 50 μm BST bridge structure and a silicon substrate with a cavity. The sensitivity and resonance frequency were designed to be 0.92 pC/Pa and 98.67 kHz, respectively. The signal to noise ratio was measured to be 74 dB. The results demonstrate that the flexoelectric microphone possesses high sensitivity and a wide working frequency range simultaneously, suggesting that flexoelectricity could be an excellent alternative sensing mechanism for microphone applications. © 2016 IOP Publishing Ltd.
| Original language | English |
|---|---|
| Article number | 045001 |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 26 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 22 Feb 2016 |
| Externally published | Yes |
Bibliographical note
Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to <a href="mailto:[email protected]">[email protected]</a>.Funding
This material is based upon work supported by, or in part by, the US Army Research Laboratory and the US Army Research Office under contract/grant number W911NF-11-1-0516; and in part by National Science Foundation under grant number CMMI-1068345.
Research Keywords
- flexoelectricity, microphone, barium strontium titanate, micro-bridge