STUDY OF POSSIBLE MATRIX EFFECTS IN THE QUANTITATIVE DETERMINATION OF OXYGEN IN HEAVILY-DOPED CZOCHRALSKI SILICON CRYSTALS

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review

View graph of relations

Author(s)

  • R. J. Bleiler
  • P. K. Chu
  • S. W. Novak
  • R. G. Wilson

Detail(s)

Original languageEnglish
Title of host publicationSecondary Ion Mass Spectrometry, SIMS VII
Subtitle of host publicationProceedings of the Seventh International Conference on Secondary Ion Mass Spectrometry (SIMS VII)
EditorsA Benninghoven, C A Evans, K D McKeegan
PublisherJohn Wiley & Sons
Pages507-510
ISBN (print)0471927384
Publication statusPublished - Sept 1989
Externally publishedYes

Conference

Title7th International Conference on Secondary Ion Mass Spectrometry (SIMS VII)
LocationHyatt Regency Hotel
PlaceUnited States
CityMonterey
Period3 - 8 September 1989

Citation Format(s)

STUDY OF POSSIBLE MATRIX EFFECTS IN THE QUANTITATIVE DETERMINATION OF OXYGEN IN HEAVILY-DOPED CZOCHRALSKI SILICON CRYSTALS. / Bleiler, R. J.; Chu, P. K. ; Novak, S. W. et al.
Secondary Ion Mass Spectrometry, SIMS VII: Proceedings of the Seventh International Conference on Secondary Ion Mass Spectrometry (SIMS VII). ed. / A Benninghoven; C A Evans; K D McKeegan. John Wiley & Sons, 1989. p. 507-510.

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review