Abstract
Dynamical characteristics of transducer are important for ultrasonic bonding quality. The admittance curves of transducer were studied by tool on/off test and clamping tightness changing test. The model of equivalent circuit is used for parameter analysis, based on admittance circle of the transducer. The results show that additive mass of bonding tool and clamp tightness may not affect resonance frequency of a PZT transducer so much, but bonding tool is one of main factors affecting performance, because it changes the distribution and dissipation of energy in the PZT transducer. These results will be helpful for optimization of the ultrasonic bonding transducer.
| Original language | English |
|---|---|
| Pages (from-to) | 59-64 |
| Journal | Weixi Jiagong Jishu/Microfabrication Technology |
| Issue number | 5 |
| Publication status | Published - Oct 2006 |
| Externally published | Yes |
Research Keywords
- Admittance circle
- Equivalent circuit
- Piezoelectric transducer
- Ultrasonic bonding
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