Structure and topographies of diamond-like carbon films produced on tungsten pre-implanted stainless steel substrate by plasma immersion ion implantation and deposition

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

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Author(s)

Detail(s)

Original languageEnglish
Pages (from-to)1490-1499
Journal / PublicationDiamond and Related Materials
Volume16
Issue number8
Publication statusPublished - Aug 2007

Abstract

DLC films were deposited by plasma immersion ion implantation and deposition (PIII-D) on steel substrates using different pretreatment procedures. Our results show that DLC films with good quality can be produced on the W pre-implanted steel substrates but it is not so on the untreated substrate or on the steel substrate with a W buffer layer. Moreover, altering the pre-implantation parameters gives rise to different distributions and amounts of W that influence the film growth at the latter stage. The final surface morphologies and structures of the deposited DLC films are also strongly affected by the pretreatment parameters. © 2006 Elsevier B.V. All rights reserved.

Research Area(s)

  • DLC film, Plasma immersion ion implantation and deposition, Pretreatment, Stainless steel, Tungsten

Citation Format(s)

Structure and topographies of diamond-like carbon films produced on tungsten pre-implanted stainless steel substrate by plasma immersion ion implantation and deposition. / Xu, Ming; Zhao, Jun; Cai, Xun et al.
In: Diamond and Related Materials, Vol. 16, No. 8, 08.2007, p. 1490-1499.

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review