Structure and properties of zirconia (ZrO2) films fabricated by plasma-assisted cathodic arc deposition

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Fingerprint

???publication_fingerprints_help???

Material Science

100
Film Material Science
100
Zirconia Material Science
100
Cathodic Arc Deposi... Material Science
28
Surface Material Science
28
Microstructure Material Science
14
Photoemission Spect... Material Science
14
Temperature Material Science
14
Dielectric Material Material Science
14
Thin Films Material Science
14
Microscopy Material Science
14
Phase Composition Material Science
14
Structure (Composit... Material Science
14
Body Fluid Material Science

Keyphrases

100
Plasma-assisted Keyphrases
100
Cathodic Arc Deposi... Keyphrases
100
Zirconia ZrO2 Keyphrases
100
ZrO2 Films Keyphrases
66
Processing Conditio... Keyphrases
33
Microstructure Keyphrases
33
X-ray Photoelectron... Keyphrases
33
Diffraction Keyphrases
33
Substrate Bias Keyphrases
33
Si(111) Keyphrases
33
Phase Composition Keyphrases
33
Atomic Force Micros... Keyphrases
33
Substrate Temperatu... Keyphrases
33
Deposition Paramete... Keyphrases
33
Structure Compositi... Keyphrases
33
Zirconium Dioxide Keyphrases
33
Processing Paramete... Keyphrases
33
Tetragonal Phase Keyphrases
33
Surface Microstruct... Keyphrases
33
Simulated Body Flui... Keyphrases
33
Apatite Keyphrases
33
Dielectric Characte... Keyphrases
33
ZrO2 Thin Films Keyphrases
33
Plasma-assisted Dep... Keyphrases
33
Zirconia Film Keyphrases
33
Required Quality Keyphrases
33
Fluid Characteristi... Keyphrases

INIS

100
films INIS
100
deposition INIS
100
plasma INIS
100
zirconium INIS
100
zirconium oxides INIS
50
processing INIS
33
microstructure INIS
33
substrates INIS
33
surfaces INIS
16
dielectrics INIS
16
performance INIS
16
x-ray diffraction INIS
16
x-ray photoelectron... INIS
16
thin films INIS
16
simulation INIS
16
atomic force micros... INIS
16
optimization INIS
16
diffraction (x-ray) INIS
16
apatites INIS
16
body fluids INIS

Engineering

100
Cathodic Arc Engineering
66
Surface Engineering
66
Microstructure Engineering
66
Processing Conditio... Engineering
33
Substrates Engineering
33
Performance Engineering
33
Substrate Bias Engineering
33
Dielectrics Engineering
33
Optimization Engineering
33
Characteristics Engineering
33
Thin Films Engineering
33
Ray Diffraction Engineering
33
Fluid Engineering
33
Atomic Force Micros... Engineering
33
Phase Composition Engineering
33
Processing Paramete... Engineering
33
Deposition Paramete... Engineering
33
Substrate Temperatu... Engineering
33
Ray Photoelectron S... Engineering
33
Assisted Deposition Engineering
Research OutputsResearch Output authored by Structure and properties of zirconia (ZrO2) films fabricated by plasma-assisted cathodic arc deposition is tagged with the concept