Structure and Properties of Titanium Nitride Fabricated by Dual Plasma Implantation and Deposition

Ricky K. Y. Fu; Paul K. Chu; X. B. Tian; S. Q. Yang

Structure and Properties of Titanium Nitride Fabricated by Dual Plasma Implantation and Deposition

Ricky K. Y. Fu, Paul K. Chu, X. B. Tian, S. Q. Yang

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Publication status	Published - May 2004
Event	The 2004 Joint Conference of The 7th International Conference on Advanced Surface Engineering (ASE 2004) and The 2nd International Conference on Surface and Interface Science and Engineering (SISE 2004) - Guangzhou, China Duration: 14 May 2004 → 16 May 2004

Conference

Conference	The 2004 Joint Conference of The 7th International Conference on Advanced Surface Engineering (ASE 2004) and The 2nd International Conference on Surface and Interface Science and Engineering (SISE 2004)
Abbreviated title	FSISE 2004
Place	China
City	Guangzhou
Period	14/05/04 → 16/05/04

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Fu, R. K. Y., Chu, P. K., Tian, X. B., & Yang, S. Q. (2004). Structure and Properties of Titanium Nitride Fabricated by Dual Plasma Implantation and Deposition. Paper presented at The 2004 Joint Conference of The 7th International Conference on Advanced Surface Engineering (ASE 2004) and The 2nd International Conference on Surface and Interface Science and Engineering (SISE 2004), Guangzhou, China.

Fu, Ricky K. Y. ; Chu, Paul K. ; Tian, X. B. et al. / Structure and Properties of Titanium Nitride Fabricated by Dual Plasma Implantation and Deposition. Paper presented at The 2004 Joint Conference of The 7th International Conference on Advanced Surface Engineering (ASE 2004) and The 2nd International Conference on Surface and Interface Science and Engineering (SISE 2004), Guangzhou, China.

@conference{4552bffcbad7479387770896bd062e97,

title = "Structure and Properties of Titanium Nitride Fabricated by Dual Plasma Implantation and Deposition",

author = "Fu, {Ricky K. Y.} and Chu, {Paul K.} and Tian, {X. B.} and Yang, {S. Q.}",

year = "2004",

month = may,

language = "English",

note = "The 2004 Joint Conference of The 7th International Conference on Advanced Surface Engineering (ASE 2004) and The 2nd International Conference on Surface and Interface Science and Engineering (SISE 2004), FSISE 2004 ; Conference date: 14-05-2004 Through 16-05-2004",

}

Fu, RKY, Chu, PK, Tian, XB & Yang, SQ 2004, 'Structure and Properties of Titanium Nitride Fabricated by Dual Plasma Implantation and Deposition', Paper presented at The 2004 Joint Conference of The 7th International Conference on Advanced Surface Engineering (ASE 2004) and The 2nd International Conference on Surface and Interface Science and Engineering (SISE 2004), Guangzhou, China, 14/05/04 - 16/05/04.

Structure and Properties of Titanium Nitride Fabricated by Dual Plasma Implantation and Deposition. / Fu, Ricky K. Y.; Chu, Paul K.; Tian, X. B. et al.
2004. Paper presented at The 2004 Joint Conference of The 7th International Conference on Advanced Surface Engineering (ASE 2004) and The 2nd International Conference on Surface and Interface Science and Engineering (SISE 2004), Guangzhou, China.

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

TY - CONF

T1 - Structure and Properties of Titanium Nitride Fabricated by Dual Plasma Implantation and Deposition

AU - Fu, Ricky K. Y.

AU - Chu, Paul K.

AU - Tian, X. B.

AU - Yang, S. Q.

PY - 2004/5

Y1 - 2004/5

M3 - RGC 32 - Refereed conference paper (without host publication)

T2 - The 2004 Joint Conference of The 7th International Conference on Advanced Surface Engineering (ASE 2004) and The 2nd International Conference on Surface and Interface Science and Engineering (SISE 2004)

Y2 - 14 May 2004 through 16 May 2004

ER -

Fu RKY, Chu PK, Tian XB, Yang SQ. Structure and Properties of Titanium Nitride Fabricated by Dual Plasma Implantation and Deposition. 2004. Paper presented at The 2004 Joint Conference of The 7th International Conference on Advanced Surface Engineering (ASE 2004) and The 2nd International Conference on Surface and Interface Science and Engineering (SISE 2004), Guangzhou, China.