Structure and gas-barrier properties of amorphous hydrogenated carbon films deposited on inner walls of cylindrical polyethylene terephthalate by plasma-enhanced chemical vapor deposition

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

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Author(s)

  • Jing Li
  • Chunzhi Gong
  • Xiubo Tian
  • Shiqin Yang
  • Ricky K.Y. Fu

Detail(s)

Original languageEnglish
Pages (from-to)3983-3988
Journal / PublicationApplied Surface Science
Volume255
Issue number7
Publication statusPublished - 15 Jan 2009

Abstract

The influence of radio-frequency (RF) power on the structure and gas permeation through amorphous hydrogenated carbon films deposited on cylindrical polyethylene terephthalate (PET) samples is investigated. The results show that a higher radio-frequency power leads to a smaller sp3/sp2 value but produces fewer defects with smaller size. The permeability of PET samples decreases significantly after a-C:H deposition and the RF only exerts a small influence. However, the coating uniformity, color, and wettability of the surface are affected by the RF power. A higher RF power results in to better uniformity and it may be attributed to the combination of the high-density plasma and sample heating. © 2008 Elsevier B.V. All rights reserved.

Research Area(s)

  • Amorphous hydrogenated carbon film, Plasma-enhanced chemical vapor deposition, Radio frequency, Raman spectroscopy, Uniformity

Citation Format(s)

Structure and gas-barrier properties of amorphous hydrogenated carbon films deposited on inner walls of cylindrical polyethylene terephthalate by plasma-enhanced chemical vapor deposition. / Li, Jing; Gong, Chunzhi; Tian, Xiubo; Yang, Shiqin; Fu, Ricky K.Y.; Chu, Paul K.

In: Applied Surface Science, Vol. 255, No. 7, 15.01.2009, p. 3983-3988.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal