Structure analysis of cBN films prepared by DC jet plasma CVD from an Ar-N2-BF3-H2 gas system

W. J. Zhang; S. Matsumoto; K. Kurashima; Y. Bando

doi:10.1016/S0925-9635(01)00424-1

Structure analysis of cBN films prepared by DC jet plasma CVD from an Ar-N₂-BF₃-H₂ gas system

W. J. Zhang, S. Matsumoto^*, K. Kurashima, Y. Bando

^*Corresponding author for this work

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

37 Citations (Scopus)

Abstract

The structure of the cBN films deposited by DC jet plasma CVD from an Ar-N₂-BF₃-H₂ gas system was investigated by transmission electron microscopy and electron-energy-loss spectroscopy. A sequent layered-structure of Si/amorphous/hexagonal/cubic BN was revealed, which was also confirmed by the confocal Raman technique. For comparison, the phase composition, crystal size and crystallinity of cBN films deposited for different times at initial growth stage were studied by infrared spectroscopy, Raman spectroscopy and glancing-angle X-ray diffraction. A columnar growth of the cBN grains with the average column width of approximately 0.2 μm was observed. The columns were proved to be cBN single crystals elongated from the nucleation sites on the hexagonal BN to the film surface. High-density twins and stacking faults were observed on the (111) planes of the cBN crystals, which subdivided the crystals into many lamellae of several to about 20 nm in thickness. © 2001 Elsevier Science B.V. All rights reserved.

Original language	English
Pages (from-to)	1881-1885
Journal	Diamond and Related Materials
Volume	10
Issue number	9-10
Online published	21 Aug 2001
DOIs	https://doi.org/10.1016/S0925-9635(01)00424-1
Publication status	Published - Sept 2001
Externally published	Yes

Research Keywords

Boron nitride
Confocal Raman
Defects
EELs
Film structure
Grain size
TEM

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@article{4322bfc606a14813abe352d1e1e56540,

title = "Structure analysis of cBN films prepared by DC jet plasma CVD from an Ar-N2-BF3-H2 gas system",

abstract = "The structure of the cBN films deposited by DC jet plasma CVD from an Ar-N2-BF3-H2 gas system was investigated by transmission electron microscopy and electron-energy-loss spectroscopy. A sequent layered-structure of Si/amorphous/hexagonal/cubic BN was revealed, which was also confirmed by the confocal Raman technique. For comparison, the phase composition, crystal size and crystallinity of cBN films deposited for different times at initial growth stage were studied by infrared spectroscopy, Raman spectroscopy and glancing-angle X-ray diffraction. A columnar growth of the cBN grains with the average column width of approximately 0.2 μm was observed. The columns were proved to be cBN single crystals elongated from the nucleation sites on the hexagonal BN to the film surface. High-density twins and stacking faults were observed on the (111) planes of the cBN crystals, which subdivided the crystals into many lamellae of several to about 20 nm in thickness. {\textcopyright} 2001 Elsevier Science B.V. All rights reserved.",

keywords = "Boron nitride, Confocal Raman, Defects, EELs, Film structure, Grain size, TEM",

author = "Zhang, {W. J.} and S. Matsumoto and K. Kurashima and Y. Bando",

year = "2001",

month = sep,

doi = "10.1016/S0925-9635(01)00424-1",

language = "English",

volume = "10",

pages = "1881--1885",

journal = "Diamond and Related Materials",

issn = "0925-9635",

publisher = "Elsevier B.V.",

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}

TY - JOUR

T1 - Structure analysis of cBN films prepared by DC jet plasma CVD from an Ar-N2-BF3-H2 gas system

AU - Zhang, W. J.

AU - Matsumoto, S.

AU - Kurashima, K.

AU - Bando, Y.

PY - 2001/9

Y1 - 2001/9

N2 - The structure of the cBN films deposited by DC jet plasma CVD from an Ar-N2-BF3-H2 gas system was investigated by transmission electron microscopy and electron-energy-loss spectroscopy. A sequent layered-structure of Si/amorphous/hexagonal/cubic BN was revealed, which was also confirmed by the confocal Raman technique. For comparison, the phase composition, crystal size and crystallinity of cBN films deposited for different times at initial growth stage were studied by infrared spectroscopy, Raman spectroscopy and glancing-angle X-ray diffraction. A columnar growth of the cBN grains with the average column width of approximately 0.2 μm was observed. The columns were proved to be cBN single crystals elongated from the nucleation sites on the hexagonal BN to the film surface. High-density twins and stacking faults were observed on the (111) planes of the cBN crystals, which subdivided the crystals into many lamellae of several to about 20 nm in thickness. © 2001 Elsevier Science B.V. All rights reserved.

AB - The structure of the cBN films deposited by DC jet plasma CVD from an Ar-N2-BF3-H2 gas system was investigated by transmission electron microscopy and electron-energy-loss spectroscopy. A sequent layered-structure of Si/amorphous/hexagonal/cubic BN was revealed, which was also confirmed by the confocal Raman technique. For comparison, the phase composition, crystal size and crystallinity of cBN films deposited for different times at initial growth stage were studied by infrared spectroscopy, Raman spectroscopy and glancing-angle X-ray diffraction. A columnar growth of the cBN grains with the average column width of approximately 0.2 μm was observed. The columns were proved to be cBN single crystals elongated from the nucleation sites on the hexagonal BN to the film surface. High-density twins and stacking faults were observed on the (111) planes of the cBN crystals, which subdivided the crystals into many lamellae of several to about 20 nm in thickness. © 2001 Elsevier Science B.V. All rights reserved.

KW - Boron nitride

KW - Confocal Raman

KW - Defects

KW - EELs

KW - Film structure

KW - Grain size

KW - TEM

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U2 - 10.1016/S0925-9635(01)00424-1

DO - 10.1016/S0925-9635(01)00424-1

M3 - RGC 21 - Publication in refereed journal

SN - 0925-9635

VL - 10

SP - 1881

EP - 1885

JO - Diamond and Related Materials

JF - Diamond and Related Materials

IS - 9-10

ER -