TY - JOUR
T1 - Structural, electrical, and optical properties of Zn1-xSn xO thin films deposited by reactive co-sputtering
AU - Ye, Fan
AU - Zhong, Xue
AU - Cai, Xing-Min
AU - Huang, Long-Biao
AU - Roy, V. A L
AU - Jing, Shou-Yong
AU - Zhang, Dong-Ping
AU - Fan, Ping
AU - Luo, Jing-Ting
AU - Tian, Xiao-Qing
PY - 2013/11
Y1 - 2013/11
N2 - Zn1-xSnxO thin films were deposited on K9 glass and Si substrates by co-sputtering Zn and Sn targets under atmospheres of Ar and O2. The samples were then characterized with X-ray diffraction (XRD), Raman, energy-dispersive X-ray spectroscopy (EDX), Seebeck effect, four-probe instrument, and UV/VIS spectrophotometry. XRD and Raman show that all the samples are hexagonal and Sn doping increases the stress greatly. EDX demonstrates that the atomic ratio of Sn to Sn plus Zn is 0.04-0.07. All the samples are n-type. The resistivity of Zn1-xSnxO is much smaller than that of undoped ZnO deposited under the same conditions. The optical bandgap of Zn1-xSnxO is also reduced compared with that of ZnO deposited under the same conditions. © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
AB - Zn1-xSnxO thin films were deposited on K9 glass and Si substrates by co-sputtering Zn and Sn targets under atmospheres of Ar and O2. The samples were then characterized with X-ray diffraction (XRD), Raman, energy-dispersive X-ray spectroscopy (EDX), Seebeck effect, four-probe instrument, and UV/VIS spectrophotometry. XRD and Raman show that all the samples are hexagonal and Sn doping increases the stress greatly. EDX demonstrates that the atomic ratio of Sn to Sn plus Zn is 0.04-0.07. All the samples are n-type. The resistivity of Zn1-xSnxO is much smaller than that of undoped ZnO deposited under the same conditions. The optical bandgap of Zn1-xSnxO is also reduced compared with that of ZnO deposited under the same conditions. © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
KW - co-sputtering
KW - doping
KW - Sn
KW - ZnO
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U2 - 10.1002/pssa.201329266
DO - 10.1002/pssa.201329266
M3 - RGC 21 - Publication in refereed journal
SN - 1862-6300
VL - 210
SP - 2404
EP - 2408
JO - Physica Status Solidi (A) Applications and Materials Science
JF - Physica Status Solidi (A) Applications and Materials Science
IS - 11
ER -