Structural and thermal analysis of a thermally actuated polymer micro robotic gripper

Zhihua Liu; Yangjie Wei; Ho-Yin Chan; Wen Jung Li; Zaili Dong; Yuechao Wang

doi:10.1109/ROBIO.2004.1521824

Structural and thermal analysis of a thermally actuated polymer micro robotic gripper

Zhihua Liu
, Yangjie Wei
, Ho-Yin Chan
, Wen Jung Li
, Zaili Dong
, Yuechao Wang

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

3 Citations (Scopus)

Abstract

This paper describes the structural and thermal modeling of a thermally actuated polymer micro robotic gripper. The basic structure for the gripper is a trimorph thermal actuator with a platinum metal heater encapsulated by parylene C polymer layers. Due to the large difference of thermal expansion coefficients between different structural layers, the actuator can be actuated with much larger deflections than conventional MEMS actuators. In this paper, we presented a finite-element modeling of thermal transient response and the thermo-mechanical coupling behavior of the polymer MEMS gripper.

Original language	English
Title of host publication	Proceedings of the 2004 IEEE International Conference on Robotics and Biomimetics
Publisher	IEEE
Pages	470-473
ISBN (Print)	0-7803-8614-8
DOIs	https://doi.org/10.1109/ROBIO.2004.1521824
Publication status	Published - Aug 2004
Externally published	Yes
Event	2004 IEEE International Conference on Robotics and Biomimetics (ROBIO 2004) - Shenyang, China Duration: 22 Aug 2004 → 26 Aug 2004

Conference

Conference	2004 IEEE International Conference on Robotics and Biomimetics (ROBIO 2004)
Place	China
City	Shenyang
Period	22/08/04 → 26/08/04

Research Keywords

MEMS microgripper
Micro themal actuator
Polymer MEMS actuator

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10.1109/ROBIO.2004.1521824

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@inproceedings{97c4322b01a64c9fba00e224ac0d2c3a,

title = "Structural and thermal analysis of a thermally actuated polymer micro robotic gripper",

abstract = "This paper describes the structural and thermal modeling of a thermally actuated polymer micro robotic gripper. The basic structure for the gripper is a trimorph thermal actuator with a platinum metal heater encapsulated by parylene C polymer layers. Due to the large difference of thermal expansion coefficients between different structural layers, the actuator can be actuated with much larger deflections than conventional MEMS actuators. In this paper, we presented a finite-element modeling of thermal transient response and the thermo-mechanical coupling behavior of the polymer MEMS gripper. ",

keywords = "MEMS microgripper, Micro themal actuator, Polymer MEMS actuator",

author = "Zhihua Liu and Yangjie Wei and Ho-Yin Chan and Li, \{Wen Jung\} and Zaili Dong and Yuechao Wang",

year = "2004",

month = aug,

doi = "10.1109/ROBIO.2004.1521824",

language = "English",

isbn = "0-7803-8614-8",

pages = "470--473",

booktitle = "Proceedings of the 2004 IEEE International Conference on Robotics and Biomimetics",

publisher = "IEEE",

address = "United States",

note = "2004 IEEE International Conference on Robotics and Biomimetics (ROBIO 2004) ; Conference date: 22-08-2004 Through 26-08-2004",

}

Liu, Z, Wei, Y, Chan, H-Y , Li, WJ, Dong, Z & Wang, Y 2004, Structural and thermal analysis of a thermally actuated polymer micro robotic gripper. in Proceedings of the 2004 IEEE International Conference on Robotics and Biomimetics. IEEE, pp. 470-473, 2004 IEEE International Conference on Robotics and Biomimetics (ROBIO 2004), Shenyang, China, 22/08/04. https://doi.org/10.1109/ROBIO.2004.1521824

Structural and thermal analysis of a thermally actuated polymer micro robotic gripper. / Liu, Zhihua; Wei, Yangjie; Chan, Ho-Yin et al.
Proceedings of the 2004 IEEE International Conference on Robotics and Biomimetics. IEEE, 2004. p. 470-473.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Structural and thermal analysis of a thermally actuated polymer micro robotic gripper

AU - Liu, Zhihua

AU - Wei, Yangjie

AU - Chan, Ho-Yin

AU - Li, Wen Jung

AU - Dong, Zaili

AU - Wang, Yuechao

PY - 2004/8

Y1 - 2004/8

N2 - This paper describes the structural and thermal modeling of a thermally actuated polymer micro robotic gripper. The basic structure for the gripper is a trimorph thermal actuator with a platinum metal heater encapsulated by parylene C polymer layers. Due to the large difference of thermal expansion coefficients between different structural layers, the actuator can be actuated with much larger deflections than conventional MEMS actuators. In this paper, we presented a finite-element modeling of thermal transient response and the thermo-mechanical coupling behavior of the polymer MEMS gripper.

AB - This paper describes the structural and thermal modeling of a thermally actuated polymer micro robotic gripper. The basic structure for the gripper is a trimorph thermal actuator with a platinum metal heater encapsulated by parylene C polymer layers. Due to the large difference of thermal expansion coefficients between different structural layers, the actuator can be actuated with much larger deflections than conventional MEMS actuators. In this paper, we presented a finite-element modeling of thermal transient response and the thermo-mechanical coupling behavior of the polymer MEMS gripper.

KW - MEMS microgripper

KW - Micro themal actuator

KW - Polymer MEMS actuator

UR - https://www.scopus.com/pages/publications/28344446957

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-28344446957&origin=recordpage

U2 - 10.1109/ROBIO.2004.1521824

DO - 10.1109/ROBIO.2004.1521824

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 0-7803-8614-8

SP - 470

EP - 473

BT - Proceedings of the 2004 IEEE International Conference on Robotics and Biomimetics

PB - IEEE

T2 - 2004 IEEE International Conference on Robotics and Biomimetics (ROBIO 2004)

Y2 - 22 August 2004 through 26 August 2004

ER -

Structural and thermal analysis of a thermally actuated polymer micro robotic gripper

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