Structural analysis of ferromagnetic Mn-doped ZnO thin films deposited by radio frequency magnetron sputtering

C. Liu; F. Yun; B. Xiao; S. J. Cho; Y. T. Moon; H. Morko̧; Morad Abouzaid; R. Ruterana; K. M. Yu; W. Walukiewicz

doi:10.1063/1.1941465

Structural analysis of ferromagnetic Mn-doped ZnO thin films deposited by radio frequency magnetron sputtering

C. Liu
, F. Yun
, B. Xiao
, S. J. Cho
, Y. T. Moon
, H. Morko̧
, Morad Abouzaid
, R. Ruterana
, K. M. Yu
, W. Walukiewicz

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

69 Citations (Scopus)

Abstract

We report on the structural analysis of ferromagnetic Mn-doped ZnO thin films deposited by radio frequency magnetron sputtering, using transmission electron microscopy (TEM), high-resolution x-ray diffraction, and Rutherford backscattering spectroscopy (RBS) measurements. The ferromagnetic Mn-doped ZnO film showed magnetization hysteresis at 5 and 300 K. A TEM analysis revealed that the Mn-doped ZnO included a high density of round-shaped cubic and elongated hexagonal MnZn oxide precipitates. The incorporation of Mn caused a large amount of structural disorder in the crystalline columnar ZnO lattice, although the wurtzite crystal structure was maintained. The observed ferromagnetism is discussed based on the structural characteristics indicated by TEM and the behavior of Mn when it is substituted into a ZnO lattice derived from RBS measurements. © 2005 American Institute of Physics.

Original language	English
Article number	126107
Journal	Journal of Applied Physics
Volume	97
Issue number	12
DOIs	https://doi.org/10.1063/1.1941465
Publication status	Published - 2005
Externally published	Yes

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@article{da312337eabf440b8e162f4fa3251022,

title = "Structural analysis of ferromagnetic Mn-doped ZnO thin films deposited by radio frequency magnetron sputtering",

abstract = "We report on the structural analysis of ferromagnetic Mn-doped ZnO thin films deposited by radio frequency magnetron sputtering, using transmission electron microscopy (TEM), high-resolution x-ray diffraction, and Rutherford backscattering spectroscopy (RBS) measurements. The ferromagnetic Mn-doped ZnO film showed magnetization hysteresis at 5 and 300 K. A TEM analysis revealed that the Mn-doped ZnO included a high density of round-shaped cubic and elongated hexagonal MnZn oxide precipitates. The incorporation of Mn caused a large amount of structural disorder in the crystalline columnar ZnO lattice, although the wurtzite crystal structure was maintained. The observed ferromagnetism is discussed based on the structural characteristics indicated by TEM and the behavior of Mn when it is substituted into a ZnO lattice derived from RBS measurements. {\textcopyright} 2005 American Institute of Physics.",

author = "C. Liu and F. Yun and B. Xiao and Cho, \{S. J.\} and Moon, \{Y. T.\} and H. Mork{\c o} and Morad Abouzaid and R. Ruterana and Yu, \{K. M.\} and W. Walukiewicz",

year = "2005",

doi = "10.1063/1.1941465",

language = "English",

volume = "97",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "12",

}

TY - JOUR

T1 - Structural analysis of ferromagnetic Mn-doped ZnO thin films deposited by radio frequency magnetron sputtering

AU - Liu, C.

AU - Yun, F.

AU - Xiao, B.

AU - Cho, S. J.

AU - Moon, Y. T.

AU - Morko̧, H.

AU - Abouzaid, Morad

AU - Ruterana, R.

AU - Yu, K. M.

AU - Walukiewicz, W.

PY - 2005

Y1 - 2005

N2 - We report on the structural analysis of ferromagnetic Mn-doped ZnO thin films deposited by radio frequency magnetron sputtering, using transmission electron microscopy (TEM), high-resolution x-ray diffraction, and Rutherford backscattering spectroscopy (RBS) measurements. The ferromagnetic Mn-doped ZnO film showed magnetization hysteresis at 5 and 300 K. A TEM analysis revealed that the Mn-doped ZnO included a high density of round-shaped cubic and elongated hexagonal MnZn oxide precipitates. The incorporation of Mn caused a large amount of structural disorder in the crystalline columnar ZnO lattice, although the wurtzite crystal structure was maintained. The observed ferromagnetism is discussed based on the structural characteristics indicated by TEM and the behavior of Mn when it is substituted into a ZnO lattice derived from RBS measurements. © 2005 American Institute of Physics.

AB - We report on the structural analysis of ferromagnetic Mn-doped ZnO thin films deposited by radio frequency magnetron sputtering, using transmission electron microscopy (TEM), high-resolution x-ray diffraction, and Rutherford backscattering spectroscopy (RBS) measurements. The ferromagnetic Mn-doped ZnO film showed magnetization hysteresis at 5 and 300 K. A TEM analysis revealed that the Mn-doped ZnO included a high density of round-shaped cubic and elongated hexagonal MnZn oxide precipitates. The incorporation of Mn caused a large amount of structural disorder in the crystalline columnar ZnO lattice, although the wurtzite crystal structure was maintained. The observed ferromagnetism is discussed based on the structural characteristics indicated by TEM and the behavior of Mn when it is substituted into a ZnO lattice derived from RBS measurements. © 2005 American Institute of Physics.

UR - https://www.scopus.com/pages/publications/21644438305

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-21644438305&origin=recordpage

U2 - 10.1063/1.1941465

DO - 10.1063/1.1941465

M3 - RGC 21 - Publication in refereed journal

SN - 0021-8979

VL - 97

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 12

M1 - 126107

ER -

Structural analysis of ferromagnetic Mn-doped ZnO thin films deposited by radio frequency magnetron sputtering

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