Structural analysis of arc deposited diamond-like carbon films by Raman and X-ray photoelectron spectroscopy

Liuhe Li; Haiquan Zhang; Yanhua Zhang; Paul K. Chu; Xiubo Tian; Lifang Xia; Xinxin Ma

doi:10.1016/S0921-5107(02)00079-X

Structural analysis of arc deposited diamond-like carbon films by Raman and X-ray photoelectron spectroscopy

Liuhe Li
, Haiquan Zhang
, Yanhua Zhang
, Paul K. Chu
, Xiubo Tian
, Lifang Xia
, Xinxin Ma

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

49 Citations (Scopus)

Abstract

Diamond-like carbon (DLC) films were deposited using metal arc under different experimental conditions. The ultra microhardness and load-displacement curves show that the typical hardness values of the deposited films range from 10 to 100 GPa. The detailed relationship between the sp³ structure and the D peak observed in the Raman spectra is investigated. For further studies, the C1s binding energy was determined employing X-ray photoelectron spectroscopy. Our results disclose that DLC films with very different sp³ structures may exhibit similar D Raman peaks. © 2002 Elsevier Science B.V. All rights reserved.

Original language	English
Pages (from-to)	95-101
Journal	Materials Science and Engineering B: Solid-State Materials for Advanced Technology
Volume	94
Issue number	1
DOIs	https://doi.org/10.1016/S0921-5107(02)00079-X
Publication status	Published - 15 Jun 2002

Research Keywords

Diamond-like carbon films
Hardness
Raman spectroscopy
X-ray photoelectron spectroscopy

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10.1016/S0921-5107(02)00079-X

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@article{6f1a7eb351764a3b99f6139f90fcdcce,

title = "Structural analysis of arc deposited diamond-like carbon films by Raman and X-ray photoelectron spectroscopy",

abstract = "Diamond-like carbon (DLC) films were deposited using metal arc under different experimental conditions. The ultra microhardness and load-displacement curves show that the typical hardness values of the deposited films range from 10 to 100 GPa. The detailed relationship between the sp3 structure and the D peak observed in the Raman spectra is investigated. For further studies, the C1s binding energy was determined employing X-ray photoelectron spectroscopy. Our results disclose that DLC films with very different sp3 structures may exhibit similar D Raman peaks. {\textcopyright} 2002 Elsevier Science B.V. All rights reserved.",

keywords = "Diamond-like carbon films, Hardness, Raman spectroscopy, X-ray photoelectron spectroscopy",

author = "Liuhe Li and Haiquan Zhang and Yanhua Zhang and Chu, \{Paul K.\} and Xiubo Tian and Lifang Xia and Xinxin Ma",

year = "2002",

month = jun,

day = "15",

doi = "10.1016/S0921-5107(02)00079-X",

language = "English",

volume = "94",

pages = "95--101",

journal = "Materials Science and Engineering B: Solid-State Materials for Advanced Technology",

issn = "0921-5107",

publisher = "Elsevier Ltd.",

number = "1",

}

Structural analysis of arc deposited diamond-like carbon films by Raman and X-ray photoelectron spectroscopy. / Li, Liuhe; Zhang, Haiquan; Zhang, Yanhua et al.
In: Materials Science and Engineering B: Solid-State Materials for Advanced Technology, Vol. 94, No. 1, 15.06.2002, p. 95-101.

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

TY - JOUR

T1 - Structural analysis of arc deposited diamond-like carbon films by Raman and X-ray photoelectron spectroscopy

AU - Li, Liuhe

AU - Zhang, Haiquan

AU - Zhang, Yanhua

AU - Chu, Paul K.

AU - Tian, Xiubo

AU - Xia, Lifang

AU - Ma, Xinxin

PY - 2002/6/15

Y1 - 2002/6/15

N2 - Diamond-like carbon (DLC) films were deposited using metal arc under different experimental conditions. The ultra microhardness and load-displacement curves show that the typical hardness values of the deposited films range from 10 to 100 GPa. The detailed relationship between the sp3 structure and the D peak observed in the Raman spectra is investigated. For further studies, the C1s binding energy was determined employing X-ray photoelectron spectroscopy. Our results disclose that DLC films with very different sp3 structures may exhibit similar D Raman peaks. © 2002 Elsevier Science B.V. All rights reserved.

AB - Diamond-like carbon (DLC) films were deposited using metal arc under different experimental conditions. The ultra microhardness and load-displacement curves show that the typical hardness values of the deposited films range from 10 to 100 GPa. The detailed relationship between the sp3 structure and the D peak observed in the Raman spectra is investigated. For further studies, the C1s binding energy was determined employing X-ray photoelectron spectroscopy. Our results disclose that DLC films with very different sp3 structures may exhibit similar D Raman peaks. © 2002 Elsevier Science B.V. All rights reserved.

KW - Diamond-like carbon films

KW - Hardness

KW - Raman spectroscopy

KW - X-ray photoelectron spectroscopy

UR - https://www.scopus.com/pages/publications/0037097015

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-0037097015&origin=recordpage

U2 - 10.1016/S0921-5107(02)00079-X

DO - 10.1016/S0921-5107(02)00079-X

M3 - RGC 21 - Publication in refereed journal

SN - 0921-5107

VL - 94

SP - 95

EP - 101

JO - Materials Science and Engineering B: Solid-State Materials for Advanced Technology

JF - Materials Science and Engineering B: Solid-State Materials for Advanced Technology

IS - 1

ER -

Structural analysis of arc deposited diamond-like carbon films by Raman and X-ray photoelectron spectroscopy

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