Steady-State Direct-Current Plasma Immersion Ion Implantation Using a Multipolar Magnetic Field ECR Plasma Source

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Original language	English
Title of host publication	VI^thInternational Workshop on Plasma-Based Ion Implantation - Abstract
Pages	102
Publication status	Published - Jun 2001
Event	VI^th International Workshop on Plasma-Based Ion Implantation - Grenoble, France Duration: 26 Jun 2001 → 28 Jun 2001 http://www.polycnrs-gre.fr/

Conference	VI^th International Workshop on Plasma-Based Ion Implantation
Place	France
City	Grenoble
Period	26/06/01 → 28/06/01
Internet address	http://www.polycnrs-gre.fr/

Other Access Options

@inproceedings{66acd9e845a14506b2b0de302680e616,

title = "Steady-State Direct-Current Plasma Immersion Ion Implantation Using a Multipolar Magnetic Field ECR Plasma Source",

author = "X.C. Zeng and Z.J. Xu and Q.C. Chen and H.H. Tong and K.Y. Fu and P.K. Chu",

year = "2001",

month = jun,

language = "English",

pages = "102",

booktitle = "VIth International Workshop on Plasma-Based Ion Implantation - Abstract",

note = "VI<sup>th</sup> International Workshop on Plasma-Based Ion Implantation ; Conference date: 26-06-2001 Through 28-06-2001",

url = "http://www.polycnrs-gre.fr/",

}

Steady-State Direct-Current Plasma Immersion Ion Implantation Using a Multipolar Magnetic Field ECR Plasma Source. / Zeng, X.C.; Xu, Z.J.; Chen, Q.C. et al.
VI^thInternational Workshop on Plasma-Based Ion Implantation - Abstract. 2001. p. 102.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Steady-State Direct-Current Plasma Immersion Ion Implantation Using a Multipolar Magnetic Field ECR Plasma Source

AU - Zeng, X.C.

AU - Xu, Z.J.

AU - Chen, Q.C.

AU - Tong, H.H.

AU - Fu, K.Y.

AU - Chu, P.K.

PY - 2001/6

Y1 - 2001/6

M3 - RGC 32 - Refereed conference paper (with host publication)

SP - 102

BT - VIth International Workshop on Plasma-Based Ion Implantation - Abstract

T2 - VI<sup>th</sup> International Workshop on Plasma-Based Ion Implantation

Y2 - 26 June 2001 through 28 June 2001

ER -