STATISTICAL PROCESS CONTROL (SPC) FOR AFM MICROROUGHNESS MEASUREMENTS

P. K. Chu, R. G. Brigham, S. M. Baumann

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Pages	253-258
Publication status	Published - Dec 1994
Externally published	Yes
Event	1994 IUMRS International Conference on the Electronic Materials (ICEM'94) - Hsinchu, Taiwan Duration: 19 Dec 1994 → 21 Dec 1994

Conference	1994 IUMRS International Conference on the Electronic Materials (ICEM'94)
Abbreviated title	IUMRS-ICEM'94
Country/Territory	Taiwan
City	Hsinchu
Period	19/12/94 → 21/12/94

Other Access Options

@conference{b164a2e3e3f84711a507f9ad529f7866,

title = "STATISTICAL PROCESS CONTROL (SPC) FOR AFM MICROROUGHNESS MEASUREMENTS",

author = "Chu, {P. K.} and Brigham, {R. G.} and Baumann, {S. M.}",

year = "1994",

month = dec,

language = "English",

pages = "253--258",

note = "1994 IUMRS International Conference on the Electronic Materials (ICEM'94), IUMRS-ICEM'94 ; Conference date: 19-12-1994 Through 21-12-1994",

}

TY - CONF

T1 - STATISTICAL PROCESS CONTROL (SPC) FOR AFM MICROROUGHNESS MEASUREMENTS

AU - Chu, P. K.

AU - Brigham, R. G.

AU - Baumann, S. M.

PY - 1994/12

Y1 - 1994/12

UR - https://www.sciencedirect.com/science/article/pii/0961129095801553

M3 - RGC 32 - Refereed conference paper (without host publication)

SP - 253

EP - 258

T2 - 1994 IUMRS International Conference on the Electronic Materials (ICEM'94)

Y2 - 19 December 1994 through 21 December 1994

ER -