Statistical detection of defect patterns using hough transform

Qiang Zhou; Li Zeng; Shiyu Zhou

doi:10.1109/TSM.2010.2048959

Author(s)

Qiang Zhou
Li Zeng
Shiyu Zhou

Detail(s)

Original language	English
Article number	5453039
Pages (from-to)	370-380
Journal / Publication	IEEE Transactions on Semiconductor Manufacturing
Volume	23
Issue number	3
Online published	22 Apr 2010
Publication status	Published - Aug 2010
Externally published	Yes

Link(s)

DOI	DOI https://doi.org/10.1109/TSM.2010.2048959 Final Published version
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Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-77955459831&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(76e1e4e6-faf6-4c5e-a391-9db848217449).html

Abstract

Surface defects on semiconductor wafers often exhibit particular spatial patterns. These patterns contain valuable information of the fabrication processes and can help engineers identify the potential root causes. In this paper, we present a control chart technique to detect spatial patterns of surface defects by using the Hough transform. An approximate distribution model of the monitoring statistic is proposed, and a comprehensive control chart design method is developed. This method is characterized by its intuitive implication and a simple design procedure which relates the statistical performance of the control chart to the design parameters. A case study is presented to validate the effectiveness of this method. © 2006 IEEE.

Research Area(s)

Control chart, Hough transform (HT), spatial pattern, surface quality control

Citation Format(s)

[ RIS ] [ BibTeX ]

Statistical detection of defect patterns using hough transform. / Zhou, Qiang; Zeng, Li; Zhou, Shiyu.
In: IEEE Transactions on Semiconductor Manufacturing, Vol. 23, No. 3, 5453039, 08.2010, p. 370-380.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

Zhou, Q, Zeng, L & Zhou, S 2010, 'Statistical detection of defect patterns using hough transform', IEEE Transactions on Semiconductor Manufacturing, vol. 23, no. 3, 5453039, pp. 370-380. https://doi.org/10.1109/TSM.2010.2048959

Zhou, Q., Zeng, L., & Zhou, S. (2010). Statistical detection of defect patterns using hough transform. IEEE Transactions on Semiconductor Manufacturing, 23(3), 370-380. Article 5453039. Advance online publication. https://doi.org/10.1109/TSM.2010.2048959

Zhou Q, Zeng L, Zhou S. Statistical detection of defect patterns using hough transform. IEEE Transactions on Semiconductor Manufacturing. 2010 Aug;23(3):370-380. 5453039. Epub 2010 Apr 22. doi: 10.1109/TSM.2010.2048959

Zhou, Qiang ; Zeng, Li ; Zhou, Shiyu. / Statistical detection of defect patterns using hough transform. In: IEEE Transactions on Semiconductor Manufacturing. 2010 ; Vol. 23, No. 3. pp. 370-380.