Abstract
A soft inkpad imprinting technique to create stacked micrometer and submicrometer polymer patterns was analyzed. A surface treated hard mold was coated on by a polymer film using a thin soft inkpad. The polymer film on the hard mold was transferred to a substrate along with a negative pattern of the mold formed on the soft inkpad. The results show that multiple transfers of polymers with similar solubilities to the hard mold can be made using the soft inkpad, as coating is done without chemical solutions.
| Original language | English |
|---|---|
| Pages (from-to) | 1873-1878 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 22 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - Jul 2004 |
| Externally published | Yes |
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