Spectrum-based model reduction of rapid thermal processing system

Tengfei Xiao; Han-Xiong Li

doi:10.1109/CACS.2014.7097196

Spectrum-based model reduction of rapid thermal processing system

Tengfei Xiao
, Han-Xiong Li

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

1 Citation (Scopus)

Abstract

In order to study the temperature distribution on the wafer in a rapid thermal processing system, we develop a reduced model of the dynamic based on the spectrum of the system operator. The dominant modes of the system are extracted through the analysis of the spectrum. Galerkin's method is utilized to construct the reduced model of the system with the dominant modes as the trial functions. Simulations are performed by comparing the high-order model with the proposed reduced model. Simulation results show that the proposed reduced model has relatively small order but the same ability to model the process.

Original language	English
Title of host publication	CACS 2014 - 2014 International Automatic Control Conference, Conference Digest
Publisher	IEEE
Pages	249-253
ISBN (Print)	9781479945849
DOIs	https://doi.org/10.1109/CACS.2014.7097196
Publication status	Published - 28 Apr 2014
Event	2014 International Automatic Control Conference, CACS 2014 - Kaohsiung, Taiwan, China Duration: 26 Nov 2014 → 28 Nov 2014 https://ieeexplore.ieee.org/xpl/conhome/7091353/proceeding?sortType=vol-only-seq&isnumber=7097153&pageNumber=3

Conference

Conference	2014 International Automatic Control Conference, CACS 2014
Place	Taiwan, China
City	Kaohsiung
Period	26/11/14 → 28/11/14
Internet address	https://ieeexplore.ieee.org/xpl/conhome/7091353/proceeding?sortType=vol-only-seq&isnumber=7097153&pageNumber=3

Research Keywords

Galerkin's method
model reduction
rapid thermal processing
spectrum

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title = "Spectrum-based model reduction of rapid thermal processing system",

abstract = "In order to study the temperature distribution on the wafer in a rapid thermal processing system, we develop a reduced model of the dynamic based on the spectrum of the system operator. The dominant modes of the system are extracted through the analysis of the spectrum. Galerkin's method is utilized to construct the reduced model of the system with the dominant modes as the trial functions. Simulations are performed by comparing the high-order model with the proposed reduced model. Simulation results show that the proposed reduced model has relatively small order but the same ability to model the process.",

keywords = "Galerkin's method, model reduction, rapid thermal processing, spectrum",

author = "Tengfei Xiao and Han-Xiong Li",

year = "2014",

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doi = "10.1109/CACS.2014.7097196",

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AU - Li, Han-Xiong

PY - 2014/4/28

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N2 - In order to study the temperature distribution on the wafer in a rapid thermal processing system, we develop a reduced model of the dynamic based on the spectrum of the system operator. The dominant modes of the system are extracted through the analysis of the spectrum. Galerkin's method is utilized to construct the reduced model of the system with the dominant modes as the trial functions. Simulations are performed by comparing the high-order model with the proposed reduced model. Simulation results show that the proposed reduced model has relatively small order but the same ability to model the process.

AB - In order to study the temperature distribution on the wafer in a rapid thermal processing system, we develop a reduced model of the dynamic based on the spectrum of the system operator. The dominant modes of the system are extracted through the analysis of the spectrum. Galerkin's method is utilized to construct the reduced model of the system with the dominant modes as the trial functions. Simulations are performed by comparing the high-order model with the proposed reduced model. Simulation results show that the proposed reduced model has relatively small order but the same ability to model the process.

KW - Galerkin's method

KW - model reduction

KW - rapid thermal processing

KW - spectrum

UR - https://www.scopus.com/pages/publications/84949927104

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U2 - 10.1109/CACS.2014.7097196

DO - 10.1109/CACS.2014.7097196

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 9781479945849

SP - 249

EP - 253

BT - CACS 2014 - 2014 International Automatic Control Conference, Conference Digest

PB - IEEE

T2 - 2014 International Automatic Control Conference, CACS 2014

Y2 - 26 November 2014 through 28 November 2014

ER -

Spectrum-based model reduction of rapid thermal processing system

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