Special 10kV solid state power modulator for plasma immersion ion implantation treatment of industrial bearings

B. Y. Tang; L. P. Wang; P. K. Chu; K. Y. Gan; X. F. Wang; S. Y. Wang

doi:10.1109/PPPS.2001.961184

Special 10kV solid state power modulator for plasma immersion ion implantation treatment of industrial bearings

Research output: Journal Publications and Reviews › RGC 22 - Publication in policy or professional journal

Overview

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Author(s)

B. Y. Tang
L. P. Wang
K. Y. Gan
X. F. Wang
S. Y. Wang

Detail(s)

Original language	English
Journal / Publication	IEEE International Conference on Plasma Science
Publication status	Published - 2001

Conference

Title	28th IEEE International Conference on Plasma Science / 13th IEEE International Pulsed Power Conference
Place	United States
City	Las Vegas, NV
Period	17 - 22 June 2001

Link(s)

DOI	DOI https://doi.org/10.1109/PPPS.2001.961184 Final Published version
	Check@CityULib
Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-17444447037&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(56337faf-69e6-48a0-90e4-63621bfb83d9).html

Abstract

We have recently developed a 10kV solid state power modulator for the processing of industrial bearings by plasma immersion ion implantation. According to our research results, high energy implantation is not preferred in the treatment of industrial bearings because of the geometry of the races, and a dedicated and less expensive power supply will suffice. In our new design, optical communication modules are used to synchronize the control pulse of each IGBT and a new method is used to generate power for the IGBT gate drive in the solid state modulator. In addition to a maximum voltage of 10kV, our inexpensive power modulator can output pulses 2 to 100 microseconds in duration with a rise time of 2 microseconds. The maximum pulsing frequency is 2kHz. We will present the details of the design and the experimental results in this paper.