Some examples of the application of a unified Schottky-Poole-Frenkel theory to high-k dielectric capacitor structures

W. S. Lau; O. Y. Wong; H. Wong

doi:10.1109/EDSSC.2013.6628085

Some examples of the application of a unified Schottky-Poole-Frenkel theory to high-k dielectric capacitor structures

W. S. Lau, O. Y. Wong, H. Wong

Department of Electrical Engineering

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Abstract

It has been difficult to distinguish whether the leakage current mechanism is Schottky emission or Poole-Frenkel effect for high-k capacitors. We would like to point out that the two mechanisms can be combined into a unified theory as illustrated by some examples involving hafnium oxide capacitors. © 2013 IEEE.

Original language	English
Title of host publication	2013 IEEE International Conference of Electron Devices and Solid-State Circuits, EDSSC 2013
DOIs	https://doi.org/10.1109/EDSSC.2013.6628085
Publication status	Published - 2013
Event	2013 IEEE International Conference of Electron Devices and Solid-State Circuits, EDSSC 2013 - Hong Kong, Hong Kong, China Duration: 3 Jun 2013 → 5 Jun 2013

Conference

Conference	2013 IEEE International Conference of Electron Devices and Solid-State Circuits, EDSSC 2013
Place	Hong Kong, China
City	Hong Kong
Period	3/06/13 → 5/06/13

Research Keywords

high-k capacitors
unified theory

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10.1109/EDSSC.2013.6628085

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title = "Some examples of the application of a unified Schottky-Poole-Frenkel theory to high-k dielectric capacitor structures",

abstract = "It has been difficult to distinguish whether the leakage current mechanism is Schottky emission or Poole-Frenkel effect for high-k capacitors. We would like to point out that the two mechanisms can be combined into a unified theory as illustrated by some examples involving hafnium oxide capacitors. {\textcopyright} 2013 IEEE.",

keywords = "high-k capacitors, unified theory",

author = "Lau, {W. S.} and Wong, {O. Y.} and H. Wong",

year = "2013",

doi = "10.1109/EDSSC.2013.6628085",

language = "English",

isbn = "9781467325233",

booktitle = "2013 IEEE International Conference of Electron Devices and Solid-State Circuits, EDSSC 2013",

note = "2013 IEEE International Conference of Electron Devices and Solid-State Circuits, EDSSC 2013 ; Conference date: 03-06-2013 Through 05-06-2013",

}

Lau, WS, Wong, OY & Wong, H 2013, Some examples of the application of a unified Schottky-Poole-Frenkel theory to high-k dielectric capacitor structures. in 2013 IEEE International Conference of Electron Devices and Solid-State Circuits, EDSSC 2013., 6628085, 2013 IEEE International Conference of Electron Devices and Solid-State Circuits, EDSSC 2013, Hong Kong, Hong Kong, China, 3/06/13. https://doi.org/10.1109/EDSSC.2013.6628085

Some examples of the application of a unified Schottky-Poole-Frenkel theory to high-k dielectric capacitor structures. / Lau, W. S.; Wong, O. Y.; Wong, H.
2013 IEEE International Conference of Electron Devices and Solid-State Circuits, EDSSC 2013. 2013. 6628085.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

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T1 - Some examples of the application of a unified Schottky-Poole-Frenkel theory to high-k dielectric capacitor structures

AU - Lau, W. S.

AU - Wong, O. Y.

AU - Wong, H.

PY - 2013

Y1 - 2013

N2 - It has been difficult to distinguish whether the leakage current mechanism is Schottky emission or Poole-Frenkel effect for high-k capacitors. We would like to point out that the two mechanisms can be combined into a unified theory as illustrated by some examples involving hafnium oxide capacitors. © 2013 IEEE.

AB - It has been difficult to distinguish whether the leakage current mechanism is Schottky emission or Poole-Frenkel effect for high-k capacitors. We would like to point out that the two mechanisms can be combined into a unified theory as illustrated by some examples involving hafnium oxide capacitors. © 2013 IEEE.

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KW - unified theory

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DO - 10.1109/EDSSC.2013.6628085

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 9781467325233

BT - 2013 IEEE International Conference of Electron Devices and Solid-State Circuits, EDSSC 2013

T2 - 2013 IEEE International Conference of Electron Devices and Solid-State Circuits, EDSSC 2013

Y2 - 3 June 2013 through 5 June 2013

ER -

Some examples of the application of a unified Schottky-Poole-Frenkel theory to high-k dielectric capacitor structures

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