TY - JOUR
T1 - Solventless Polymerization
T2 - Spatial Migration of a Catalyst To Form Polymeric Thin Films in Microchannels
AU - Gu, Hongwei
AU - Xu, Chenjie
AU - Weng, Lu-Tao
AU - Xu, Bing
PY - 2003/8/1
Y1 - 2003/8/1
N2 - This paper reports a simple, additive process to generate patterned polymer films without using any solvent. This process involves a highly efficient catalyst, a Grubbs's catalyst, and a volatile monomer, norbornene. The catalyst and monomers have higher local concentrations inside the microchannels, formed by contacting poly(dimethylsiloxane) stamps to a solid surface, and allow the polymeric thin films to be defined by the microchannels. The patterned thin film serves as an excellent resistant to reactive ion etching, which promises that this process is a complementary, useful alternative to spin-coating and plasma polymerization in microfabrication.
AB - This paper reports a simple, additive process to generate patterned polymer films without using any solvent. This process involves a highly efficient catalyst, a Grubbs's catalyst, and a volatile monomer, norbornene. The catalyst and monomers have higher local concentrations inside the microchannels, formed by contacting poly(dimethylsiloxane) stamps to a solid surface, and allow the polymeric thin films to be defined by the microchannels. The patterned thin film serves as an excellent resistant to reactive ion etching, which promises that this process is a complementary, useful alternative to spin-coating and plasma polymerization in microfabrication.
UR - http://www.scopus.com/inward/record.url?scp=0041708056&partnerID=8YFLogxK
UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-0041708056&origin=recordpage
U2 - 10.1021/ja029954a
DO - 10.1021/ja029954a
M3 - RGC 21 - Publication in refereed journal
SN - 0002-7863
VL - 125
SP - 9256
EP - 9257
JO - Journal of the American Chemical Society
JF - Journal of the American Chemical Society
IS - 31
ER -